二手 NIKON NSR 2205 i12D #293695326 待售

Stepper, 8" Wafer loader type: 3" Wafer type: Notch Chuck size: 8" Chuck type: ring Wafer carrier table: Left, Right Max NA: 0.63 Max field size: 22 mm x 22mm Reticle size: 6" Reticle case size: 6" Reticle barcode reader Electric source with 2 for CVCF NA variable system Fixed reticle microscope Alignment sensor: FIA, LSA Pre alignment 2 Chip leveling Left in-line In-line interface type Rack type: Right HP 5517C Laser Body-OP rack cable: 3M PPD Shrink illuminator TTLFC2 focus check function ASAHI S19 Chamber Chamber temperature: 23.0°C 1997 vintage.