二手 NIKON NSR 2205 i14E #9223212 待售

i-Line stepper, 8" Main system: Main body Operation rack Control rack Non-SMIF system PC: DMCC Display: LCD Monitor Halogen lamp: SE-025720-N1 PCB Boards: Interferometer VME unit LC Unit ALG Unit OPD Unit STG Unit S/G Unit RL Unit WL Unit LSA Laser head: 3225H-PCN Interferometer laser head: 5517C Reticle indexer: Indexer R150 IU Power: 439 mW/cm³ Uniformity: 4.67% TTL-FC2: 19 nm Focus: 51 nm TFD: 188 nm Distortion maximum (X/Y): 14 / 20 nm Distortion minimum (X/Y): -25 / -26 nm Wafer flatness: 0.8 um Local flatness: 0.3 um LSA Translation: X: -8 nm Y: 5 nm LSA 3sigma: X: 55 nm Y: 58 nm FIA Translation: X: -10 nm Y: 1 nm FIA 3sigma: X: 55 nm Y: 56 nm Shot magnification: 0.39 ppm Shot rotation: -0.376 urad CIM Linked.