二手 NIKON NSR SF130 #293660357 待售
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ID: 293660357
晶圆大小: 12"
优质的: 2004
i-Line stepper, 12"
SEMES KSPIN12 Load module
HP DS10 Workstation
SR10MP 4IL2 Lens
HBO 5004 Laser
Process modules:
Light source
Alignment
Stage
Missing parts:
FW Robot
RL Index robot and controller
RL Buffer robot and controller
Blind YD and XL-axis unit
Morocco board
R-Θ Robot
Robot controller
RL PRE1 Z-Axis motor
RL PRE1 PRC Motor
IU-DRV10M
2004 vintage.
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