二手 ULTRATECH 1500 MVS #9293528 待售

Stepper, 6" Stage type: SERVO Driven X and Y Stepper motor driven in theta Multi-axis air bearings Laser metered Laser resolution: 40 nm Vibration control: Isolated granite table Computer: HP 362 Controller Graphics monitor Enclosed impact printer Wafer handling: Cassette to cassette autoloader Manual loader / Robotic loader Imaging and lens (1.0 µm): Resolution: 1.0 µm CD Control: 0.9 ≤ CD ≤ 1.1 µm DOF: > 3.0 µm Lens distortion: ≤ 160 nm, 100% Lens matching (A-B): ≤ 180 nm, 100% Maximum image area: 34.2 x 13.6 mm Longest rectangle: 39.0 x 11.4 mm Largest square: 18.0 x 18.0 mm Exposure spectrum: 390-450 nm Imaging and lens (0.8 µm): Resolution: 0.8 µm CD Control: 0.72 ≤ CD ≤ 0.88 µm DOF: > 2.0 µm Lens distortion: ≤ 110 nm, 100% Lens matching (A-B): ≤ 130 nm, 100% Maximum image area: 31.80 x 11.5 mm Longest rectangle: 34.0 x 10.0 mm Largest square: 15.5 x 15.5 mm Exposure spectrum: 390-450 nm Exposure (1.0 µm and 0.8 µm): Uniformity: 3.0%, 2.5% Wafer plan irradience: ≥1000 wM/cm² 2000 vintage.