二手 AMAT / APPLIED MATERIALS VeraSEM #9196915 待售
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ID: 9196915
晶圆大小: 8"
优质的: 2000
3D Scanning electron microscope (SEM), 8"
Wafer shape: SNNF
PP Miraial, 8"
No SMIF interface
Electron optical system:
Electron gun: Schottky emission source (FEI)
Accelerating voltage: 300V - 2000V
Probe current:
Low: 5pA
Medium: 10pA
High: 20pA
Electromagnetic lens: 3 Stages electromagnetic lens
Boosting voltage: Beam deflector module
Objective lens
Scan coil: 2 Stages electromagnetic deflection (X & Y-axes)
Magnification: 1,000x to 400,000x (100µm to 0.25µm FOV)
Wafer imaging ability: Entire surface of 8" (or 12") wafer
Asspect ratio: >14:1
Tilt function: 5 Degrees (4 Directions)
Resolution: 3nm (500V)
Optical microscope system:
COHU CCD Camera: Monochrome
Magnification: 16x / 220x (450µm / 6000µm FOV)
Wafer imaging ability: Entire surface of 8" (or 12") wafer
Workstation:
Model: SGI Octane
OS: Unix
HDD Capacity: 73 GB
Memory: 1024 MB
SECS/GEM Communication interface
Wafer stages: ANORAD X,Y & Z Stages
Moving speed: 300 mm/sec
Function target: Faraday cup / Resolution target
Wafer transfer:
Wafer shape ability: Notch / Orientation flat
Pre-alignment: Sensing by CCD bar (200/300 mm wafer)
External power distribution unit
Fun filter unit
Uninterruptible power supply: POWERWARE+Plus 18/18
Dry pump load lock: EBARA AA20
Dry pump chamber: EBARA A10S
2000 vintage.
AMAT/APPLIED MATERIALS VeraSEM是一种先进的晶圆测试和计量设备，提供最高水平的精度、精度和吞吐量。AMAT VeraSEM强大、灵活、强大的平台允许集成解决方桉,以提高晶圆测试的质量、生产率和产量。应用材料VeraSEM是一个由四个主要组件组成的集成系统：扫描仪和样品级、先进的晶圆检测仪、光学检测仪和聚焦传感机以及激光工具。VeraSEM的扫描仪和样品阶段设计为提供精确、可重复的扫描和样品定位，以确保最大的测试效率。该资产具有出色的可重复性和稳定性,为多个操作保留相同的扫描和采样位置。AMAT/APPLIED MATERIALS VeraSEM先进晶片检测模型利用先进光源、专用滤光片和传感器快速识别晶片中的弱点、气泡、划痕等缺陷。该设备还可以精确测量晶圆厚度、平坦度和倾斜度。光学检查和聚焦传感系统允许高精度的表面和背面检查，以检测可能对生产过程产生影响的问题。该单元还能够测量和跟踪小缺陷，提供晶圆状况的全面视图。最后，利用激光机器精确测量晶圆轮廓、IPE、EPE和Zernike分析。它还提供精确的测量来检测粒子、坑等。AMAT VeraSEM是任何一个寻求一个多合一解决方桉来测试、测量和检查各种晶圆尺寸的企业的理想选择。该工具精确、可重复的扫描、先进的晶片检测、光学检测和聚焦传感以及激光系统，使其成为晶片测试和计量的强大工具。
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