二手 ISIS SENTRONICS SemDex 301-34 #9129394 待售
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ID: 9129394
优质的: 2013
Wafer metrology system
Maximum accessible diameter: 210 mm (StraDex a3-50)
Accessible rotation: 90° / 180°
Auto focus
StraDex a3 - 50 (Precision mechanical bearing)
StraDex f24 - 300 (Airbearing)
Antivibration plate below chuck
Optical wavelengths:
StraDex a3 - 50: ~500 nm (Maximum height evaluation 120 μm)
StraDex f24 - 300: 1300 nm (Minimum silicon thickness 10 μm)
(2) Calibrated silicon objects:
123 μm thick plate with 10 nm roughness
300 μm thick plate with 1 nm roughness
Technical specifications:
Sensor system:
StraDex a3 - 50 (top left):
Field-of-view: (0.35 mm)^2
Lateral pixel size: 0.35 μm
Working distance: 3.5 mm
Auto-focus range: 4 mm
Maxmimum warp: <3 mm
Maximum Z-height: 60 μm (High-resolution ) / 120 μm
Repeatability (high-resolution): 0.5 nm (In-plane), 3 nm (step)
Total acquisition time: Type 4 seconds, 1 seconds (Reduced FOV)
Maximum focusing speed: 200 pm/s
StraDex f24 - 300 (Top & Bottom center):
Spot size: 24 μm
Auto-focus range: 24 - 44 mm
Maximum warp: 1.5 mm
Maximum acquisition rate (Fast mode): 4 kHz
Thickness (Silicon):
10-350 μm (Fast mode)
10 - 800 μm (Slow mode)
Thickness (Glass, Polymer):
20 - 750 μm (Fast mode)
20 - 1000 μm (Slow mode)
Acquisition rate: <4 kHz
Accuracy and repeatability conditions:
Surface roughness Rz < 0.1 μm
Confidence range: 2 Sigma
Thickness sensor (Stradex f24 - 300) performance:
Absolute accuracy: < +/- 0.5 μm
Repeatability (fast mode): < +/- 0.1 μm
Repeatability (slow mode): < +/- 0.5 μm
Stage:
Maximum X / Y Travel range: 300 x 300 mm^2
Maximum velocity: 30 mm/s
Lateral accuracy: 2 μm
Maximum height variation repeatable: 2 μm
Free positioning via keypads
Anti-vibration table
Air suspension
Perforated vacuum:
Chuck for double side (Swiss cheese)
Unframed and framed wafers for 6"-12"
Inter-center spacing: 10 mm Holes at 20 mm
Vacuum for wafer suction (6 Bar air pressure required)
Computer: Intel i7 with screen
(2) HDD Raids
With (2) 1TB
Fan filter unit: ISO Class 10
Housing: White powdered coating
Data interface: LAN
Temperature: 10°C-35°C
Power supply: 100-240 V, 50-60 Hz, 3kW
Barcode scanner
Barcode and recipe
SECS/GEM Extension:
SEMI (E 30, E 37, E 5) Includes
Recipe handling (RMS)
2013 vintage.
ISIS SENTRONICS SemDex 301-34是为半导体生产、检验和封装应用而设计的晶圆测试和计量系统。它由专门为半导体工业开发的先进光学传感和检查系统提供动力。它为缺陷检测、地形分析、电气表征、迭加和位置定位以及2D/3D晶圆检测提供了集成解决方桉。SemDex 301-34具有多种凋刻和扫描技术来执行过程和计量操作。该单元配备了全套车载成像工具，包括一系列激光、线路扫描和AutoTrack相机。集成了一个正在进行的电气测试系统，允许实时报告测试设备的电气参数。ISIS SENTRONICS SemDex 301-34提供了详细的模具映射功能，允许用户准确验证所有缺陷的位置。各种高速扫描模式可用于准确表征整个晶片，而高分辨率成像工具甚至可以检测到最小的缺陷。无论晶片条件如何,该单元都能提供优异的结果,并且能够检查任何大小、形状和厚度的晶片。SemDex 301-34还具有强大的Overlay和Offset管理功能。实时偏移分析仪提供低至5纳米的覆盖范围测量，以保证晶圆在扫描过程中的精确对准。为快速、自动化缺陷评估和数据分析提供了批量检测和模式识别功能。ISIS SENTRONICS SemDex 301-34是用于半导体测试、检查和封装需求的功能强大且可靠的工具。它强大的设计和先进的能力使其适合广泛的应用，从简单的模具检查到复杂的过程和计量操作。SemDex 301-34可用于在半导体领域实现更高的收益率，降低成本，并保证最大质量保证。
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