二手 KLA / TENCOR 5300 #9161978 待售

Overlay measurement system Hardware configuration: Chuck: 8" Handler: Open cassette with PRI dual end-effector robot Cassette type: Dual open cassette Line conditioner: Yes Network: Yes Signal tower: No UPS: Smart-UPS 500 Main console: Yes Load port: 8" (2) Open cassette stations VME: CPU Board: Yes Memory board: Yes Video (Matrox) board: Yes I/O Board: Yes PZT Controller board: Yes I/O Adapter board: Yes Motion and controller: Power supply: Yes X Driver board: Yes V Driver board: Yes Z Driver board: Yes T Driver board: Yes L Driver board: Yes XYT Stage: Yes PM Target: Yes Z Motor: Yes Host chuck: 8" Z PZT: Yes PCB and pneumatics panel: I/O Interface board PZT Driver board Interlock board Pressure panel Vacuum panel Flotation module: IDE Controller (8) Motors (3) Proximity sensors (3) Hard stop LINNIK and AMS: HLS Lamp housing: Yes Dual aperture: Yes LLG: Yes LlNNIK Camera: Yes PIN Diode array: Yes P PZT: Yes Shutter: Yes AMS Camera: Yes Power module: P Power transformer (Line conditioner): Yes AC Compartment: Yes Main DC power supply: Yes HLS Power supply: Yes Software configuration: Operation system: Windows NT 4.0 Computer configuration: CPU: Pentium II 400 MHz RAM: 256M (2) Hard drive disks: 9G Floppy drive: Yes CD ROM: Yes Tape driver: Yes Monitor: Yes Thermal printer: Yes Keyboard / Tracking ball: Yes Facilities: Input power: 225VAC, 50/60 Hz Computer input power: 110 VAC Input vacuum: 25 Inches Hg Input CDA: 97 - 110 PSI Handler check: Robot: Yes End effector: Yes Pre aligner: Yes L Cassette: Yes R Cassette: Yes Currently crated 2001 vintage.