二手 KLA / TENCOR Alpha Step 100 #9016122 待售

Profilometer / Surface profiler Scan unit: Model number: 10-00020 Controller unit: Model number: 10-00030 Power requirements: 117 V - 60 Hz Features: Automatic leveling Measurements completed in less than 1 minute 1,000 Å full-scale No shock isolation required Mechanical, electronic and thermal stability Specifications: Measurement ranges (full-scale deflection): 1,000 å, 2,500 å, 5,000 å, 10 kå, 25 kå, 50 kå, 100 kå, 250 kå, 500 kå, 1,000 kå Resolution: 10 å (minimum detectable step) Auto zero: Recorder automatically starts at any preset level Horizontal magnification / scan speed / recorder speed: 50 x / 0.1 mm/sec 5 mm/sec 500 x / 0.01 mm/sec / 5 mm/sec 2500 x / 0.01 mm/sec / 25 mm/sec Scan length: 3 mm in either direction (6 mm total) Stylus: diamond 12.5 µ radius standard Tracking force: Factory-set 15-18 mg (1 mg minimum) Sample stage dimension: 190 mm (7.5") w x 127 mm (5") deep Sample stage movement: X-axis: 3 mm (12") Y-axis: 48 mm (1.9") Z-axis: 11 mm (46") plus (vertical) stylus lift Throat depth: 65 mm (2.54") allowing measurement anywhere on a 125-mm (5") Dia wafer Maximum acceptable sample thickness: 11 mm (46") Operational modes: Automatic leveling and scan Manual leveling and scan Automatic leveling and manual scan Optics: Non-inverted image, 22x magnification Illumination: Light-emitting diodes Chart recorder: Type: Thermal printing Chart speeds: 5 and 25 mm/sec Chart size: 5 cm (2") Continuous roll Linearity: ±1% full-scale Max drift vs temperature: 0.5 division/10°c Max drift vs time: 0.1 division/8 hrs Dimensions: Scan unit: 208 mm (8.2") w x 226 mm (8.9") h x 422 mm (16.6") d Control unit: 216 mm (8.5") w x 125 mm (4.9") h x 394 mm (15.5") d Weight: Scan unit: 7.7 kg (17 lbs) Control unit: 6.4 kg (14 lbs).