二手 KLA / TENCOR Flexus F2320 #293751864 待售

Thin film stress measurement system Chuck size, 8" Temperature range: 500°C Laser scanning to measure stress Measures and displays stress Data analysis capabilities Plotting for Statistical Process Control (SPC) 3-D Map of wafer deflection entire surface Bi-axial modulus of elasticity and linear expansion Operating system: MS-DOS.