二手 KLA / TENCOR / PROMETRIX Omnimap RS-75 #9190988 待售
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ID: 9190988
优质的: 1997
Resistance mapping system
Measurement range: <5 mΩ/sq - >5MΩ/sq
Appropriate probe head: <0.2% (1σ)
Manually loaded single wafer: ≤60 seconds
Typical measurement time: 49-site test
Measurement capabilities:
Routine check: 1-30 sites programmable (ASTM standard tests included)
XY Map: 1,200 sites programmable
Single/Dual configuration capability
Analysis capabilities:
Contour/3D map: 49, 81, 121, 225, 361, 441, 625 sites
Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites
Probe qualification test: 20 sites, programmable radius
Calibration curves for low-dose monitoring
File editing/data extraction capability
Average difference/ratio maps
Trend/SQC charts
Histograms
Data transfer: SECS II/RS232 Communication (Data upload)
Precision probe heads:
40 mil Probe spacing: 100 gm loading
Tip radius: 1.6, 4, 8 and 20 mil
25 mil Probe spacing: 100 gm loading
Tip radius: 1.6, 4, and 8 mil
62.5 mil Probe spacing: 200 gm loading
Tip radius: 1.6 mil
High-speed tester accommodates all standard wafer diameters
in thicknesses up to 2 mm: 2, 3, and 3.25 in; 100, 125, 150 and 200 mm
Includes:
High-resolution color monitor
1.4 MB, 3.5" floppy drive
Fixed hard drive
Line conditioner
EMO Circuitry
Pentium computer
1997 vintage.
KLA/TENCOR/PROMETRIX Omnimap RS-75是一种先进的晶圆测试和计量设备,设计精确度和速度。该系统能够快速准确地对晶片和其他基板进行无损检测和计量。最先进的KLA Omnimap RS-75具有高分辨率的防反射涂层摄像机,用于观察和测量晶圆的表面和边缘。其先进的光学和相机分辨率提供更清晰、更详细的图像和准确的测量。提供了一个高级软件包,用于执行图像分析、图像存储和图像处理等操作,从而能够快速高效地检查晶圆的表面和边缘。TENCOR OMNIMAP RS75除了它的高分辨率、防反射涂层摄像机外，还包括一个极其精确的双面100 µm分辨率晶圆传感器。该传感器具有很高的精度和精确度,能够扫描晶片的两侧,从而能够识别异物、毛刺和表面不规则性。该单元还配备了可配置的扫描模式，允许灵活性和易用性。PROMETRIX Omnimap RS-75还标配了功能强大的扫描马达和扫描算法。这使机器能够在x-y-z轴中精确扫描基板,并围绕z轴旋转基板。这允许快速和高效的分析和处理，提供了一个全面的评估基材。TENCOR Omnimap RS-75的灵活性和准确性使其成为一种特殊的晶圆测试和计量工具。其先进的配置和特点使其成为工业质量控制和检验操作的理想选择。资产的直观界面使其易于使用，为组织提供了高效可靠的晶圆测试和计量模型。
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