二手 WYKO / VEECO NT 3300 #9304712 待售
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ID: 9304712
优质的: 2004
Optical 3D surface profiler
Measurement technique:
Optical phase-shifting
White light vertical scanning
Interferometry
Measurement capability:
Three-dimensional
Non-contact
Surface profile measurements
COHU 1100 Analog camera
With digital interface board
Digital swap compatible res for 3300: 6612
Camera array size for 3300: 640 x 480
Upgraded LED for 3300
Objectives: 1.5x, 2x
Measurement array:
Maximum array: 736 x 480
Standard: 1000 x 1000
Light source: Tungsten halogen
Lamp: Automated filter selection
Stages:
Manual: ± 2"
X/Y Translation: 200 mm (± 50.8 mm)
Rotation: ± 90°
Tip / Tilt: ± 6°
Options:
Automated: ± 4" (101.6 mm)
X/Y Translation
Automated R/f
Rotation: 360°
Radius: 4" / 8" (101.6 mm / 203.2 mm)
Tip / Tilt head: Motorized / Automated
Optical assembly:
Integrated
Computer-controlled illuminator
Automated discrete zoom with magnification sensing
Automated stages
Closed-loop precision vertical scanning assembly
RS170 Video display: 230 mm
PC Computer
Processor: Pentium
SVGA Monitor, 17" (430 mm)
Live image stays up on SVGA through measurement
Processor: G5
Computer: Windows XP
(24) Monitors
Advanced analyzer
Stitching
Fast automation
GALIL 4-Axis controller
Stage: 8 x 8
Motorized nosepiece
With objective: 5x, 50x
LED Illumination
Performance:
Vertical measurement range:
Standard: 0.1 nm to 1 mm
Vertical resolution: <1A Ra
RMS Repeatability: <0.01 nm
Scan speed:
Standard: Up to 7.2 µm/sec (288 µin./sec)
Lateral spatial sampling: 0.08 to 13.1 µm
Field of view: 8.24 mm to 0.05 mm
Maximum slope: 25° to 1.8°
Reflectivity: 1% to 100%
Environment:
Temperature range: 15° to 30°C (59°F to 86°F)
Non-condensing humidity range: <80%
Power requirements:
Compressed air: 60 - 100 PSI
Input voltage: 100-120 VAC / 200-240 VAC, 50/60 Hz
Power consumption: <300 W
With stage: <400 W
2004 vintage.
WYKO/VEECO NT 3300是一种晶圆测试和计量设备,用于检查晶圆和其他薄膜材料的结构和质量。该系统包含各种专门的组成部分,允许对各种样本类型进行分析。WYKO NT 3300可以进行空间和角度精度分别为1 μ m和0.1°的测量,并且可以测量直径最大为300 mm的晶圆。该装置提供各种先进的成像技术,用于检查厚度不超过50 μ米的薄膜装置。成像选项基于一系列能够在各种照明条件下捕捉图像的高精度相机。例如,机器可以从brightfield切换到darkfield成像,从而可以检测否则可能不可见的缺陷。此外,它还能够以紫外线和红外线等不可见波长进行扫描,从而更全面地覆盖样品表面。VEECO NT 3300拥有高速、高分辨率显微镜。它的设计包括电动精密级和自动聚焦技术,允许样品在任何给定位置快速移动或聚焦。该工具还与一系列不同的光学设备兼容,使用户可以选择每个测量和成像任务的最佳放大倍数。除了成像能力外,NT 3300还具有先进的分析工具,包括表面剖面仪和三维成像工具。剖面仪以极高的精度测量表面地形的轮廓,允许用户评估表面粗糙度和其他样品细节。三维成像技术使样本特征在多个轴向平面上可视化。总之,WYKO/VEECO NT 3300是晶圆测试和计量的一种强大而通用的资产。其精确的成像和分析工具提供了对样品结构和质量的准确和详细的见解,从而能够检测和优化缺陷以及与过程相关的问题。
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