二手 FCI SYSTEM Acid Auto #9314413 待售

Auto acid wet station, 4"-6" Transfer robot 2-Cassette stock for loader and unloader Local supply system for chemical bath Auto shutters Chemical bath auto cover Hot DI preheating tank for H2O4 process Treatment: Cassette immersion type Main body: Ivory PVC 8t (Frame SUS304 40 x 40 x 1.5t) Chemical supply: Local chemical auto supply Chemical drain: Bottle drain System control: Touch screen for PLC control Safety interlock: Emergency switch Over-heating interlock Leak sensor door Transfer Chemical supply Using HT PVC sink and drain pipe (Acid) Heater / Ultrasonic / PLC N2 supply: 5N L/min, 0.5 kg/cm² N2 Sensor: 60N L/min, 4 kg/cm² N2 Bubble: 50N L/min, 4 kg/cm² N2 Gun (SUS SWG 3/8" Lock type) CDA supply: 800N L/min, 5 kg/cm² Circulation pump: 600N L/min, 5 kg/cm² Local supply pump (SUS SWG 1/2" Lock type): 300N L/min, 5 kg/cm² Air valve / Cycle (SUS SWG 3/8" Lock type) DI water supply: 60 L/min, 2 kg/cm² Power supply: AC 220 V, 150 A, 3 Phase 2010 vintage.