(2) Thermal chiller circulators
(2) 280L Sump tanks
(4) Drain pump
(2) Wasted chemical tanks
IPA Dryer
Inline heater
Quartz Tank
Megasonic transducer
Megasonic generator
Touch screen
Robot / Controller
H2O2 Spiking
Power supply: 220 V, 107.364 kVA
2014 vintage.
