二手 CAMECA TXRF 8300 #9224127 待售
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ID: 9224127
优质的: 2007
System
Specimen chamber and wafer handling:
Mini environment, class 1
Automatic centering and flat / Notch identification
Automatic thickness variation compensation
Automatic angle adjustment
Independent from wafer bow or wedge
Polar orientation independent of analyzed area
X, Y, Z, Θ, Φ Wafer stage
No vacuum chamber
Organic chuck material
Vacuum chucking during wafer displacement
X-Ray system with:
Motorized curved double multi layer monochromator
Measurement of elemental impurities on Si-wafers
Simultaneous measurement of >60 elements between Al and U
Detection limits: < 5 x 109 atoms / cm² (e.g. for Ni)
Angle adjustment of wafers to optimize signal / Background ratio
Medium frequency x-ray generator, max. 3.5 kW
High power fine-focus tubes
System prepared for W and Mo tubes
Sealed anode system
Lifetime: 2,000 Hours
SiLi Detector:
With crystal: 80 mm²
Effective sampling area: 70 mm²
Energy resolution better: 150 eV
Selectable time constants for variable resolution
Digital detector electronics
Digital pulse processing
4096 Channels ADC for spectrum analysis
Pile-up rejector
Escape peak subtraction
Standard calibration wafer
Standard droplet
Ni: 1ng
Computer control system:
PC With 256 MB RAM
FDD: 1.4 MB
CD Burner
HDD: 100 GB
TFT Monitor, 17”
16 MB Monitor adapter with hardware acceleration
Ethernet card: 10 / 100 MB
Operating system: Windows NT
Color ink printer
Graphical User Interface (GUI)
Easy set-up of measurement sequences
Break function for introduction of emergency measurements
Automatic optimization of filter setup
Individual selection of analyzing parameters
Automatic search routine for VPD droplets
E-Diagnostics and remote servicing
Fab automation
GEM SECS
Modem included
Cassette stations:
(2) Cassette stations, 6"-12"
Front and side port
Mix and match operation
Different wafer sizes in an automatic run
Clean room compatible cassette operation
X-Ray tubes:
W-Tube: 3000 W
Excitation energy: Wlb: 9.67 keV / Wla: 8.40 keV
Typically used for elements between Al - Zn and Nb - Ta
Chiller: Separate water / Air or water / Water chiller
Detector:
Model no: 7163
Resolution: 150
Detector HV bias: -500 V
Cryostat:
Capacity: 7.5 Liters
Consumption rate: <1 Liter / day
Pre-amplifier:
Type: OXFORD
Sensitivity gain: 1.6 mV / keV
FET Configuration:
Substrate voltage: -16.9 V
Heater voltage: 4.5 V
Spare parts included:
PLANAR / Multi layer block standard
Translink PCI card
Limit switch for DMT 100/65
Digital vacuum switch / Sensor
OXFORD / ISIS 300 DXP 50 Detector
Digimic for assembly 5001 u 5002.00.00 hub: 10 mm
M-521.2S Linear
Turntable DMT 100 mit motor PK244-02B
MY-COM / C30/200 Precision switches
DETECTOR ELECTRONIC / 5885/7163 Without translink card
OMRON / Micro switch DSF
OMRON / MY-COM Switch
Wafer dish / Mess chuck
2007 vintage.
CAMECA TXRF 8300是一种X射线荧光(XRF)设备,非常适合微量元素表征。X射线荧光光谱法利用X射线光束将目标样品激发成特征X射线发射,然后进行测量以确定样品的元素组成。在许多需要进行非破坏性和元素特异性分析的情况下,这种技术是理想的。TXRF 8300将X射线荧光光谱法与先进的样品制备能力相结合,使研究人员和技术人员能够满足其特定的元素测量需求。该系统将优化的大功率X射线发生器与集成的样品制备能力结合在一起,后者是实现卓越分析性能的关键。该组合单元提供了无与伦比的精确度和精确度元素浓度范围从ppm到高百分比。样品制备附件,如困难材料样品套件(DMSK),使得分析具有挑战性的样品矩阵和消除繁琐的样品预分选要求成为可能。专用软件包xSort包含组织和优化XRF实验的必要功能。xSort软件有助于简化数据采集过程,自动选择最佳测量参数,然后保存测量设置以供将来参考。CAMECA TXRF 8300的许多特点之一是它能够在单个测量中对许多元素进行表征。这可能是因为仪器提供的光束很小。机器的最小梁直径为120 μ m,非常适合进行详细的表面积分析。最后,预配置的测量参数服务菜单旨在让科学家和技术人员以最高的准确度和效率分析各种样品类型。TXRF 8300利用自动对齐技术和智能软件,在没有人工干预的情况下将样品精确定位在舞台上。综上所述,CAMECA TXRF 8300由于能够提供无与伦比的精度和精确度,是微量元素表征和X射线荧光光谱分析的完美工具。凭借其集成的样品准备功能、较小的X射线光束大小以及自动对准和软件功能,该资产是科学家和技术人员的绝佳工具。
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