二手 RIGAKU 3640 #9200622 待售

X-Ray fluorescence wafer / Disk analyzer, 8" Size: Less 1m² Silicon wafer: WSix Functions: Multi-job Multi-window Multi-point distribution measurement: Sample surface: 100 Arbitrary positions Monitor display Area sensor and protection mechanism of sample chamber lid Specification: Single layer film: BPSG, SiO2, WSix, polysilicon, W, TiN, AlSiCu, PZT, Y1 and BST on Si wafers, and oxide Metal and alloy film such as glass and ceramic Multi-layer film: Ti / Ni / Au on Si wafers Compound film: Co alloy / Cr / Ni-P on memory disks Sample chamber: Sample size: 200 mm Diameter maximum Collimator: Center measurement: Out Measurement: In (15 mm - 20 mm Diameter) Movement: XYD Driving system Goniometer Counting unit: Counting method: Multi-element Counting capacity: 1.3 × 108 Counts Counting time: 1 - 999 sec (Presettable at an interval of 1 second) X-Ray generator unit: Output: 3 kVA Stability: Within +/-0.01% X-Ray tube: Capacity: 3 kW Target: Rh Heat Exchanger: Pure water circulation method Evacuation system: Dry pump: KASHIYAMA MU100N Temperature stabilizer: Control temperature: 36.5 +/-0.2°C (Vicinity of the sensor) Computer system: Computer: Windows type personal computer Auxiliary memories: Hard disk Floppy disk: 1.44 MB × 1 (3.5") CD-ROM Monitor: LCD Printer: A4 Size ink jet printer Standard accessories: Tools Lamps Fuses Oils and greases Data capacity: Quantitative analysis: Measuring condition: 300 Process parameter formula: 40 Calculation terms / Formula 300 Formulae Calibration curve: 2000 Components Group condition: 40 Components*1 / Group 200 Groups Drift correction sample: 200 Limit range check: 40 Components*1 / Standard 500 standards Standard sample: 40 Elements / Sample 500 Samples Bias correction sample: 300 Calibration: Up to 200 - 40 constants sample Record of analysis results: 2000 Sample IDs / 10000 Measurement points Qualitative analysis: Measuring condition: 300 Group condition: 30 Conditions / Groups 50 Groups Configuration of options: Additional instruction manual: English, dust-free paper Additional instruction manual: English, plain paper 2-Theta table: English and japanese, plain paper Sample holder: 200 mm in Diameter Sample holder (With adapter): 30 mm in Diameter X-Ray indicator: With interlock function Power: 3 Phase, 200 VAC, 75 A, 50/60 Hz.