二手 AMAT / APPLIED MATERIALS eMax CT+ #9408194 待售
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ID: 9408194
Oxide etcher, 12"
TM Module
(3) PM Modules
AC Rack
RF Rack
FI (EFEM):
FI Type: 5.3 FI
MF Platform type: AP
SUPERMICRO GEN3 0090-06587 Server
SUPERMICRO GEN3 0090-06584 Server
EATON Powerware 5115 UPS, P/N: 0190-26019
MKS MACRONODE 0190-22543 FI Ethernet digital I/O
Keyboard video mouse, P/N: 0190-05111
D-LINK 0190-39904 Ethernet switch hub (24-Ports)
Sealevel, P/N: 0190-22545
Fast Data Gateways (FTG), P/N: 0010-25273
Fast Data Gateways (FTG), P/N: 0010-25274
Short flex controller assy, P/N: 0090-06516
Scanner board short flex controller assy:
SST DNET Scanner board, P/N: 0190-34513
MEI XMP Board, P/N: 0190-24445
SBS Serial board, P/N: 0190-11817
GE SBC Board, P/N: 0090-06299
(2) TAKEX SS20-TR40 Light curtains
(3) TDK TAS300 Load ports
(3) OMRON V640-HAM11-V2-1 RFID
YASKAWA XU-RCM6801 ATM Robot
YASKAWA XU-ACP4860 Aligner, P/N: 0190-14752
YASKAWA XU-ACL4230 Track, P/N: 0190-14739
YASKAWA XU-CN1170A Robot controller, P/N: 0190-23873
YAMATAKE 0190-24680 Gas panel temperature controller
Intake plenum enclosure
MF Platform:
NSK VHP TM Robot
NSK ELA-B014CG1-04 TM Robot controller
(2) Cermic dual blades: Low shoe type
ALCATEL A100L Single I-pump
MKS 124AA-00010BB TM Baratron gauge: 10TORR
GRANVILLE-PHILLIPS 275 Mini-convectron TM vacuum gauge: 10TORR
(2) GRANVILLE-PHILLIPS 275 Mini-convectron load lock vacuum gauges: 10TORR
(2) PANASONIC MQDB011AAD03 Load lock indexer controllers, P/N: 0190-19214
(2) Load lock diffusers
STM Diffuser
(2) Load lock vent valves
MKS 640 Auto Pressure Controller (APC): 10TORR
VAT 0190-03234 Slit valve
GME Chamber port assy
Lid, P/N: 0242-23452
Modular DNET IO controller (MDI):
Modular, P/N: 0190-01898
MF Interlock relay, P/N: 0190-02362
MF Interlock relay, P/N: 0190-02363
Loadlock interface, P/N: 0090-01809
Mainframe interface, P/N: 0090-01810
CDN494 IO, P/N: 0190-04745
Analog power, P/N: 0190-01971
Process chamber: A, B and C:
Chamber Control Modules (CCM):
TENTA 0190-02076 Water leak detector board
Interlock board, P/N: 0190-07052
(2) MKS 0190-23509 Quad serial boards
(2) TENTA 0190-07450 Digital I/O boards
MKS 0190-22967 Analog I/O board
SBS 0190-22255 IP Carrier board
SST 0190-16926 Devicenet scanner board
TENTA 0190-24007 SBC Board, 400 Mhz
TENTA 0190-07502 Power supply board
Shower head, 16"
Chamber liner
Cathode liner
Slit liner door
KOLLMORGEN MAG Driver, P/N: 0190-17272
ESC High Voltage Module (HVM), P/N: 0010-16690
NORCAL TPV200 Throttling gate valve, P/N: 0190-25400
NORCAL TPV200 Throttling gate valve, P/N: 0190-25401
Embedded endpoint, P/N: 0010-10663
Ceramic puck, P/N: 0040-63474
MKS DPC HE Controller, P/N: 0010-29436
Vacuum gauges:
MKS Dual range process manometer, P/N: 1350-00201
GRANVILLE-PHILLIPS 275 Mini-convectron foreline vacuum gauge, P/N: 3310-01200
Vacuum switches:
MKS 41A-21439 ATM Switch, P/N: 0190-01901
MKS 51A-21440 ATM Switch, P/N: 0190-01902
ALCATEL ATH1600M Master turbo pump
ALCATEL ATH1600M Slave turbo pump
ALCATEL ACT1300M Master turbo pump controller
ALCATEL ACT1300M Slave turbo pump controller
NORCAL 3870-01455 ISO Valve
NORCAL ESVP-1503T-NWB-CR ISO Valve, P/N: 3870-03304
ADVANCED ENERGY Ovation 2760 Source RF generator, 0190-17779
DAIHEN RMN-50N1 RF Bias match box, P/N: 0190-15322
DAIHEN AMN-30H RF Source match box, P/N: 0190-15323
Gas panel for chamber A, B and C:
Mass Flow Controllers (MFC):
Size / Make / Model
200 SCCM / CELERITY / AASGD40W1
200 SCCM / SAM / 2480G1
100 SCCM / CELERITY / AASGD40W1
300 SCCM / BROOKS AUTOMATION / GF-125C
20 SCCM / CELERITY / AASGD40W1
20 SCCM / CELERITY / AASGD40W1
20 SCCM / CELERITY / AASGD40W1
100 SCCM / CELERITY / AASGD40W1
1000 SCCM / BROOKS AUTOMATION / GF-125C
200 SCCM / CELERITY / AASGD40W1
1000 SCCM / BROOKS AUTOMATION / GF-125C
200 SCCM / CELERITY / AASGD40W1
Mass Flow Controller (MFC) for chamber A and C:
Size / Make / Model
200 SCCM / CELERITY / AASGD40W1
MKS FRCA-29015 Flow Ratio Controller (FRC):
Size: 1000 SCCM
Type: NEXTGEN 14-Sticks
Weldment type: Single line drop
Etch lean AC power rack, 12"
Power: 600A
Front: 0195-03727
Rear: 0195-03728
(3) ENI GHW-50 RF Bias generators
P/N: 0190-15319
Frequency: 13.56 MHz
(3) MKS B-5002 RF Bias generators
P/N: 0190-15320
Frequency: 2 MHz
Spare parts:
(3) UNISEM RPT6200A Chillers
(3) 13.56 Mhz RF Coaxial cables (79FT), P/N: 0620-02935
(3) 2 Mhz RF Coaxial cables (79FT), P/N: 0620-03165
CHX 485 Communication cable
(3) MAG Driver contactor cables, P/N: 0150-11950
EMO Interconnect 50FT cable, P/N: 0150-02438
(3) RGJP, P/N: 0150-15149
(3) Pump umbilicals, 75FT cable, P/N: 0150-35744
(3) Chamber cooling manifolds, P/N: 0190-22819
(3) E-FIB Insert, P/N: 0190-23662
Monitor rack
Gas panel SLD
Bottom cover
Gas panel exhaust duct
FI Intake plenum
Enclosure
IPUP
Mobile worksation
(3) SUS Pads.
AMAT/APPPLIED MATERIALS AMAT/APPLIED MATERIALS eMax CT+是一种高性能的等离子体蚀刻器/asher设备，设计用于处理各种应用。该系统提供了多个流程模块来满足每个应用程序的需求。AMAT EMAX_CT+使用获得专利的高密度直流（直流电）等离子体源，以确保低蚀刻速率和一致的工艺结果。该单元还具有多级射频偏置电源，以提高选择性和过程控制。APPLIED MATERIALS E-MAX CT+还具有双腔室工艺腔室，以提供更快的吞吐量和提高工艺产量。eMax CT+的高密度直流等离子体源可以产生10-400瓦的等离子体源，而RF偏置电源的最大输出功率高达25千瓦。源也可以配置为满足各种需求，包括Bas、BrF2、F2等多种气体溷合物。AMAT/APPLIED MATERIALS EMAX_CT+的工艺室配有一个可变面积金属穿孔气体喷头，以确保精确的气体分布，并配有一个自动比例阀，用于精确控制气体流量。AMAT eMax CT+采用先进的过程控制技术，具有脉冲控制、脉冲高度分析和先进的控制算法。这些特性可以精确控制蚀刻工艺参数，如偏置功率、压力、直流和射频功率以及EMAX_CT+工艺室压力。该机还可用于晶圆均匀度测量，因为它配备了绝对标准压力室用于校准目的。APPLIED MATERIALS eMax CT+具有高级用户界面,它提供了一组全面而直观的集成控件,以确保最大程度的工具性能。此外,嵌入式Web服务器允许通过网络连接轻松访问和控制E-MAX CT+。资产还具有自动自我诊断功能,可帮助减少出错时的停机时间。总体而言，AMAT/APPLIED MATERIALS E-MAX CT+是一种可靠的等离子体蚀刻器/aser模型，旨在提供精确的控制和高通量。设备包括高密度直流和射频电源、双室工艺室和先进的用户界面。AMAT E-MAX CT+具有先进的控制算法和全面的控件集,是一种理想且经济高效的蚀刻和灰化应用解决方桉。
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