二手 LAM RESEARCH TCP 9600 SE #9177741 待售
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ID: 9177741
晶圆大小: 8"
优质的: 2000
Metal etcher system, 8"
Software version: Version E1.5-released
Software envision: 1.5 With light pen
Process METAL ETCH
Platform type: Rainbow stand-alone TCP 9600SE
Wafer shape: SNNF
Main chamber: TCP 9600SE
Enterance loadlock: Standard entrance loadlock chamber
Exit loadlock: DSQ Chamber with 8″ paddle
APM Chamber: (2) APM DI Nozzles, N2 splayer
Load station: Belt type shuttle
Indexers: 38A Hine indexers
Wafer alinger: Universal
Upper chamber body: TCP 9600se
Gap: 6CM Upper chamber fixed gap
Electrostatic chuck type: 8″ Bi-polar ESC
Turbo pump: ALCATEL 1300M with Controller
Pressure manometer: Millipore 100mT
Pressure controller:
VAT Gate valve
PM7 Pressure controller
End point: Detector heated port
With dual channels (261.8nm/ 703nm)
Matchers:
Auto tuner
T Matcher for upper
(8) Turn RF coil matcher for Bias
Generators on board: AE-1250 For upper and bias chamber
Helium back side cooling 50sccm UPC (Unit 8130)
ADIO Boards
Main board
ESC Power supply:
(16) Channel heater controllers
Chamber: Auto tune DSQ strip module
Funnel: 8″ Quartz funnel
Paddle: 8″ Heated Paddle
Hardware configuration:
Pressure controller: AC2 Pressure controller
Pressure manometer: MKS 10TORR
WVDS: Auto fill WVDS controller
WVDS Temperature controller: Auto temp controller
Cooling fan hinged DSQ stripper
With high flow cooling fan
Vapor controller: TYLAN 500sccm H2O Controller
RF Tuner:
(8) Tunes
RF Coil matcher (DIP-PCB RF Tuner)
RF Generator on board: AE-1250
Heater controller: 853-015771-001
Spinner: 853-015759-102
DI Water nozzles:
Hot
Cold high water flow nozzles
Line 1: Gas CL2
Line 2: Gas BCL3
Line 3: Gas Ar
MFC Size: 200sccm (Unit 1660)
Line 4: Gas CF4
Line 5: Gas N2
Line 6: Gas O2
Line 7: Gas CF4
Line 8: Gas H20
EMCP*01 Part list:
(1) Transporter Exit loadlock: DSQ Chamber with 8″ Paddle
(1) Transporter APM Chamber: (2) APM DI nozzles, N2 splayer
(1) Transporter Wafer alinger universal
(1) Main chamber Electrostatic chuck type: 8″ Bi-polar ESC
(1) Main chamber Pressure manometer: Millipore 100mT
(1) Main chamber End point detector: Heated port with dual channels (261.8nm/ 703nm)
(1) Main chamber Matchers: Auto tuner/ T Matcher for upper, (8) Turn RF coil matcher for Bias
(2) Main chamber Generators on board: AE-1250 For upper and bias chamber
(1) Main chamber Helium back side: Cooling 50sccm UPC (Unit 8130)
(8) Main chamber ADIO Boards
(1) Main chamber Main board
(1) Main chamber ESC Power supply
(2) Main chamber (16) Channel heater controllers
(1) PLL Chamber Paddle: 8″ Heated paddle
(1) PLL Chamber WVDS Auto fill WVDS controller
(1) PLL Chamber Vapor controller: TYLAN 500sccm H2O Controller
(1) PLL Chamber RF Generator on board: AE-1250
(1) PLL Chamber Heater controller: 853-015771-001
(1) PLL Chamber Spinner 853-015759-102
Currently warehoused
2000 vintage.
LAM RESEARCH TCP 9600 SE是一种蚀刻器，或称为asher，设计用于半导体生产过程。这种蚀刻器是专门为化学、物理和磨料蚀刻工艺而设计的。它是一种全自动湿蚀工具，具有可编程的加工室、液体输送设备和高度可靠、耐用和坚固的机械系统。它有一个250毫米x 250毫米的加工室，可以同时处理介电和金属基板。LAM RESEARCH TCP 9600SE配备独特的喷射淋浴输送装置，提供卓越的蚀刻选择性和均匀的蚀刻结果。它还有一个集成的密封工艺室，能够快速、高效地润湿晶圆和盖板。该工艺室保持在受控压力、温度和湿度，以便产生优异的蚀刻效果。此外,TCP 9600 SE还设计了一种先进的控制机器,可在整个过程中精确控制蚀刻参数。此工具可编程为从20多个不同的过程参数点收集数据。然后,这些数据可用于仔细监控蚀刻参数,从而实现优化的蚀刻结果。此外,TCP 9600SE还提供多种安全功能。集成的腔室压力和温度传感器，连同腔室的干式排气资产，可以帮助确保人员的安全和产品的完整性。LAM RESEARCH TCP 9600 SE还具有众多的安全联锁，包括工艺室保护和最大流量敏感联锁。LAM RESEARCH TCP 9600SE与大多数蚀刻化学体系兼容，包括KOH、TMAH、四乙基氢氧化铵（TEAOH）和氢氟酸。也可与Si、GaAs、氧化铝等多种基材搭配使用。TCP 9600 SE旨在用于半导体生产过程,提供卓越的蚀刻选择性、均匀性和安全性。它是为广泛的基材材料和蚀刻化学设计的，允许优化的蚀刻结果。
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