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LAM RESEARCH
TCP 9600 SE
Etcher, 6" Robot type: Shuttle film Molecular sieve Gases: CL2, BCL3, O2, HE, SF6, N2, CF4 (2) Chamb
2018
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热门产品
LAM RESEARCH
TCP 9600 SE
Etcher, 8" APM Bias Operator interface: Bulk head Indexer: Hine 38A 715-331131-002 Fixed gao middle
283
热门产品
LAM RESEARCH
TCP 9600 SE
Metal etcher, 8" Gas box MFC Temperature controller Process kit: EPD Sensor Chuck type: Mechanical (
1389
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LAM RESEARCH
TCP 9600 SE
Etchers, 8" Control system: EnVision CPU: 586 Processor HINE 38A Indexers Process chamber: Ceramic
1469