二手 PLASMATHERM 790 #293729354 待售
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ID: 293729354
晶圆大小: 2"-6"
优质的: 1993
Reactive Ion Etcher (RIE), 2"-6"
Single chamber
Material used: Gas and Silicon
MFC: N2/SiH4/HE, HE, NH3
Pump
HX75 Chiller
RF
No loadlock
Throttle valve
Ion gauge controller: Manometer
Gas panel
Fluid input panel
Temperature control system
Operating system
1993 vintage.
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