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LAM RESEARCH
2300 Versys
Etcher, 12" Seismic brackets system SEMI Wafer Cassette type: 25-Slots Gas system type: IGS Gas box
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Polysilicon etchers, 12" (3) FOUP WIDS BTM Read Earth leakage breaker Cable: TM Subpanel, 100 ft Sys
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Polysilicon etcher, 12" Includes: 2300 Frame (2) Exelan flex chambers (2) Kiyo FX chambers LAM RES
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Metal etcher, 12" Loadport: SMIF (EFEM) Metal core tool Process chamber: (2) Metal etchers (2) MWA
164
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Metal etcher (2) Chambers (PM2, 3) With (2) Strips (PM1, 4) MF (EFEM/TM): Platform type: V2 (3) BRO
34
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