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MATRIX System 10 #293666663
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System 10

Reactive Ion Etcher (RIE) / Plasma asher NESLAB Coolflow CFT-33 Recirculating chiller.
180
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MATRIX System 10 #9245773
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System 10

Plasma asher (2) Transport modules (2) Process module models 1108 (DAIHEN Microwave asher) Spare par
191
MATRIX System 10 #9256733
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System 10

Plasma asher (2) Process heads model: 1188 Microwave ashing Surface treatment.
170