二手NOVELLUS Lot of spare parts待售
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NOVELLUS
Lot of spare parts
Make / Model / Description BROOKS AUTOMATION / MAG7 / Robot BROOKS AUTOMATION / - / EFEM BROOKS AUTO
321
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Part number / Description 02-121427-00 / SMC Chamber with gate valve assy - / NHK Pedestal heater, 8
228
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Qty / Part number / Description (2) / 05-50072-00 / Kit spindle seals (5) / 15-00399-04 / Screw top
554
