二手 BUHLER / LEYBOLD OPTICS Syrus 1350 LC III #293769460 待售
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ID: 293769460
优质的: 2020
Optical coating machine
POLYCOLD PFC-1102 HC Water vapor cryo chiller (PN: 700201-42-60)
BUSCH R5 URA0305.D5Z6.1003 Vacuum pump with booster
(2) Muco DRG 1.6 Transformers
DRG 2.5 Transformer
REGLOPLAS 90S/6/TS22/1 K/RT32 Temperature control unit
SELLA MXH 404E-S XAN119ML05 Temperature control unit
SELLA SA 6/0/MXH404+MIX XAS116ML02 Temperature control unit
Parts included:
EATON NOVA / AXCELIS 9SX 1000 UPS
BECKHOFF C5240 Industrial PC
LOOA-10759-001 Power supply
LOOA-11214-001
LOOB-12236-001
BRP 1250 A 0305 ZX Pump
WP 1250 D 2V3 ZZZZ Booster
(3) EK96006 Oil filters
(2) Rolls
LAIPPLE M63a4 Carrousel motor with NMS30 Gear box
SATISHLOH 92-005-180 Filter
(3) LOOA-10803-001 O-Rings 1853 x 8, 102105885
(2) SATISLOH O-Rings, 1577 x 10, 50-900-455
(3) O-Rings
HONEYWELL F76S1049 Water Filter
KH1098 722C-050-580-BE Gas regulator
KH1095 722C-050-540-BE Gas regulator
(2) REG HBS 200-3-2,5 Gas regulators
SCHNEIDER Optical 627-70-218 Welding protection glass
BROOKS AUTOMATION 5850E 5850EC4BE4LB2A Flow controller
GOULDS M100V3VB96012 Spare chiller ball valve
EGE SDN 11306 Flow controller
GRANVILLE PHILLIPS 392401-0-YK-P Vacuum gauge
Chamber glass porthole spare glass
(10) LOLB-11785-001 WC45DU Thrust washers, 48 x 74 x 2
(5) LONT-19257-001 MB 4530DU Bushings
(5) LOOA-14389-001 Arm rights, 1.4301
(4) Bolts with wing nuts, 12"
Box with mount and bolts
(2) LOLP-11536-001 Gaskets
(3) 102128508 Anodes
LONT-18676-001 Anode thermal transfer sheet 42663-24
(10) 426663-24
(2) LONT-18675
(20) SWAGELOK SS-8-VCR-2-GR VCR Face seal gaskets
426663-9 80345336 RD-19-C-05 Ins, Pole piece, Mark II +
(3) LOOA-11111-001 Gas distributors
LONT-18688-001 Power cable anode
(2) LONT-18687-001 Output connector sputter cathodes
(2) LOOA-11105-001 Pole piece insulators
REL-MR-24DC/1IC Relay 2961341
(4) LOST-10517-001 Insulators, 10-32M
(4) Insulators
(23) LONT-18352-001 Hex nuts, M2
426663-21 C Conn, Anode power, M, Mark II +
(16) 426869 Screws, SS, 2-56 x .375 Slotted pan head AU
LONT-18689-001 Standoff insulator anode stack
LOOA-10279-001 Protective sheet for HPE6
(15) 0201-SS-502 Hex nuts, SS, 2-56
(2) LOOS-22159-001 Ion source gas lines
LONT-18734-001 Bellow hose with adapter
(7) LONT-18397-001 O-Rings, 100 x 5 FKM 70 Shore
LONT-18670-001 O-Ring, 260 x 3 FKM 70 Shore
LONT-13951-001 O-Ring, 105 x 5 FKM 83 Shore
(2) LONT-10432-001 O-Rings, 28.3 x 1.78 FKM 70 Shore
(10) LONT-10081-001 O-Rings, 42 x 5 FKM 70 Shore
(4) LONT-18210-001 O-Rings, 45 x 3 FKM 70 Shore
(2) LONT-16277 O-Ring
LONT-18397 O-Ring
(3) LONT-16277-001 O-Rings, 75 x 5 FKM 83 Shore
(17) LONT-10077-001 O-Rings, 18 x 5 FKM 70 Shore
(15) LONT-10152-001 O-Rings, 158.1 x 5.33 FKM 75 Shore
(2) LONT-18647-001 Seals
LONT-19186-001 Lip seal 10 x 15 L 2130 NBR 60
(3) LONT-13476-001 O-Rings, 48 x 5 FKM 70 Shore
(2) LONT-13914-001 O-Rings, 55 x 5
(2) LONT-10431-001 O-Rings, 17.04 x 3.53 Vi563 70 Shore
LONT-18121-001 O-Ring, 55 x 4 NBR 70 Shore
LONT-18127-001 O-Ring, 305 x 5 FKM 70 Shore
(21) LONT-18160-001 GN 615-M 5-KN
(2) LONT-10156-001 O-Rings, 56.87 x 1.78 FKM 70 Shore
(2) LONT-18728-001 Safety couplings
(2) LONT-18731-001 Free wheel bearings
LOOA-10337-001 Stab
(2) LOOA-11337-001 Shafts with shoulder
(2) LONT-18730-001 Bearings
LOOA-10711-001 vacuum feedthrough
(6) LONT-16986-001 21 x 30 x 2 Flat gaskets
(4) LONT-18730-001 Bearings,102059884 Zyl-Shr M8x16 DIN 6912 CUNI1.5SIF60
BINDER 9920141005 M16 Female Connector
(2) LONT-18730-001 Bearings, LONT-14540-001 M6 x 30 Screws
(2) LONT-18730-001 Bearings, LONT-18092-001 parallel pin 6 m, 6 x 28 DIN 7 SS
(6) LONT-18730-001 Bearings, LONT-10164-001 M6 x 20 Screws
(2) LONT-18730-001 Bearings, LOOA-11336-001 Disc washer
(2) LONT-18730-001 Bearings, LONT-18726-001 Disc washer
(19) LONT-18730-001 Bearings, LONT-18351-001 Spring Disc 4,75 x 2, 36 x 0, 25 x 0, 38 1.4301
(5) LONT-18730-001 Bearings, 42360293 Holder f, Shudder
Misc fittings and screws
Crystal head with small box of spare parts
BINDER with labels and electrical diagram
INFICON Thin film instrument and sensor manuals CD
(2) LONT-18456-001 Micro-Ion 354
Vacuum tube, 5"
INFICON PSG500-S
DB9 Serial cable
SCHNEIDER LC1D09G7 Contactor
LONT-18690-001 Cable
(2) UNN-14028-004 Retaining rings, 8 x 0.8
LONT-18212-001 O-Ring, 86 x 3 FKM 70 Shore
(2) LONT-16277-001 O-Rings, 75 x 5 FKM 83 Shore
(6) LONT-18209-001 Quad ring, 19,60 x 24, 84 x 2, 62 x M-19 FPM 70
(6) UVN-56001-047 Deep groove ball bearings 6000 2Z
(2) LOOA-10319-001 Socket head cap screws M4 x 6 DIN 912 SS
LONT-18733-001 Microswitch
102096404 Bearing for crucible plate
(2) LONT-18234-001 Safety couplings KBK7BK-SG-10
(6) 102130047 Gas distributors
(2) Large fixtures with (6) Blades
(3) 426663-9 Insulators, Pole piece, Mark II+
(3) 0201-SS-502 Nuts, SS, 2-56,HEX
427072 Washer, SS, FLT, 089I.D.x.187O.D.x.031 T
426663-27 SHT, Thermal transfer, Gas, Dist, Mark II+
IS16637 Gas distributor
(2) 426871 Screws, SS, 10-32 x 1.938,SHCS,AU
(3) 426869 Screws, SS, 2-56 x 375 SLTD PAN HD AU
(3) 04-FL Washers, SS FLT, 220D x .115 x .016T
(2) 0201-SS-718 Washers, SS, FLT, 440D x .202 x .030T.PREC
426663-24 SHT, Thermal transfer, Anode, Mark II+
426663-25 SHT, Thermal transfer, H2O PLT, Mark II+
LOOA-11324-001 SF-CuF25 Protective hood bottom
(2) Circular plates
Large fixture with (5) Shelf / arms
(3) Pallets
Circular part with (4) Curved legs
Large vacuum tube
(2) Large boxes of rings
Wypall wipers stand
(11) Semi circular flat gray metal parts with holes
HAMMOND POWER SOLUTIONS Sentinel 211718 Transformer, 480 V to 400 Y / 231 V, 500 kVA
Manuals included
2020 vintage.
BUHLER/LEYBOLD OPTICS Syrus 1350 LC III是一款尖端的光阻设备,设计用于半导体、电信、光子学等行业的高性能、精密的光学涂层应用。这套先进的系统集成了最先进的技术和卓越的工程技术,提供卓越的涂层质量、工艺控制和生产效率。BUHLER Syrus 1350 LC III单元的核心是其精密的真空沉积室,它为光敏材料薄膜沉积到各种基板上提供了精确、可重复的受控环境。该腔室配备了高容量基板支架、精确运动控制、现场计量工具等先进功能,可对涂层工艺进行实时监控。LEYBOLD OPTICS Syrus 1350 LC III机的关键亮点之一就是能够在各种尺寸和形状的基板上实现纤薄均匀的涂层。这种能力对于需要精确控制光刻胶层厚度和光学特性的应用至关重要,例如在生产光学滤光片、防反射涂层和波导设备方面。该工具的沉积过程基于物理气相沉积(PVD)和化学气相沉积(CVD)技术的组合,这些技术允许沉积具有不同性质和性能特性的各种光刻材料。通过调整工艺参数,用户可以量身定制沉积工艺,以满足特定的应用要求,如粘合强度、光学透明度、耐化学性等。Syrus 1350 LC III资产配备了一整套工艺控制和自动化功能,以确保涂层性能一致可靠。这些包括先进的等离子体清洁和活化能力,基板加热和冷却选项,以及集成的气流控制系统。此外,该模型设计方便操作,具有用户友好的界面和直观的软件编程和监控涂层过程。在性能方面,BUHLER/LEYBOLD OPTICS Syrus 1350 LC III设备具有出色的涂层均匀性、高沉积率和低缺陷水平,非常适合需要高通量和高产量的大批量生产环境。该系统的精密涂层能力使复杂光学涂层的生产具有严格的公差和规格,满足了行业严格的质量要求。总体而言,BUHLER Syrus 1350 LC III光阻装置代表了一种最先进的解决方桉,可用于要求卓越性能、精确度和可靠性的苛刻光学涂层应用。凭借其先进的技术、强大的设计和用户友好的功能,这台机器非常适合半导体、电信和光子学行业的广泛应用,高质量的光学涂层对于实现最佳设备性能和功能至关重要。
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