二手 DNS / DAINIPPON SK-2000 #118481 待售

Spin coater / Developer DUV track system, 8" Wafer flow direction: L-type Wafer type: Notch IF-B Spinner unit configuration: (2) Coaters B-ARC (2) Coaters (3) Developers Indexer: Left type Wafers: SEMI Standard wafers / Notch type Standard type (4) Uni cassettes Coater: SC1 (Unit 3) & SC2 (Unit 4): Includes: Cups EBR Function Resist lines: 8 Line Resist pump: PDS-105G-KPV4 Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function SC3 (Unit 5) & SC4 (Unit 6): Cups: 1 Includes: EBR Function Resist pump: PDS-105G-KPV4 Resist lines: 4 Line Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function Bake: HP: (6) Units (8, 9, 11, 12, 17, 18) RHP: (8) Units (25, 26, 28, 29, 31, 32, 35, 36) CP: (7) Units (7, 10, 16, 24, 27, 30, 34) AHL: (3) Units (13, 14, 15) EEW: Unit (33) Developer: SC1 (Unit 3) & SC2 (Unit 4): Cups Developer number nozzle DIW Rinse nozzle Back side rinse line Flow meters with sensor: DEV, DIW1, DIW2, Back-side rinse, ORG, FWD Includes: Dev1 Prewet DIW1 Back side rinse TR Includes: TR1 Arm TR2 Arm TR3 Arm Others: Thermo controller model: CET-CU, Mass 7kg THC Model: SPC-2313-UC-A CP Controller model: FRD-A200-UC HMDS Supply type: Quart bottle to buffer tank Thinner supply type: Canister tank Developer supply type: Facility supply EEW: Unit (33) Lamp house type with lamp house Miscellaneous: Signal tower lamp: 3 Color (Red, orange, green) Sub module configuration: Source bottle cabinet SC Cabinet ETU Cabinet Controller cabinet IFB ACU Cabinet Input power supply box Main gas valve close Gas (Air, N2) line purge Chemical (Developer, DIW) line purge Drain PCW end capping Gas line (N2) end capping Chemical (Developer, DIW) line end capping Spin unit (Coater & developer) exhaust line caping Bake unit exhaust line caping Leak check Main power: 3 Phase, 200 V, full load 20.44 kVA, 59A 50/60 Hz, 3 Wires and GND/PE Rating 400A, AIC 65kA, motor 8A 2003 vintage.