二手 FSI / TEL / TOKYO ELECTRON Mercury MP #293737611 待售
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ID: 293737611
晶圆大小: 6"
优质的: 1994
Spray cleaning system, 6"
486 CPU
Interface SECS II
Chemicals: H2SO4, NH4OH, H2O2, DIMIX
(4) Paddle wheel
Turntable, 6" (6-Position)
CORZAN Process exhaust monitoring
LC4CP11001 Motor controller (P/N: 3690-01678)
Helios: 400VAC, 52KW
PACIFIC SCIENTIFIC 409244-003 Brushless servomotor
PHOTOHELIC Process exhaust monitoring
Canister exhaust monitoring
Single manifold with 4-Flow controllers
Side bowl spray post
Dual etch probe
Power supply: 240 V
1994 vintage.
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