二手 KARL SUSS / MICROTEC Gamma DSSP #9232866 待售
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ID: 9232866
优质的: 2013
Coater / Developer system
4M
Quantity / Part number / Description
(1) / V700041 / SUSS Gamma microlithography cluster 4M
(1) / 100005154 / SUSS Gamma frame extension 2S
(1) / 100005155 / SUSS Gamma adjustable air flow cover 4M
(1) / 100009611 / Safety interlock for all doors on the system
(1) / 100005513 / Auto carrier ID dialog
(1) / V700032 / Bar code reader for sequence selection
(1) / 100009610 / Single end effector robot (SR8230)
(1) / V711021 / Optical cassette scanner
(1) / 100001254 / Special stacked (4) I/O gamma
(1) / Q11986-08 / Carrier-LEDs for (2) carriers
(1) / 100010113 / Rotational pre-aligner
(1) / Q200286-01 / Special fork type vacuum end effector R4-R6 for robot with minimized heat transfer
(2) / V709001 / SUSS Topography coater alta sprays
(2) / 100006861 / Special substrate assembly R4 alta sprays BSR
(2) / - / Special substrate assembly R6 alta sprays BSR
(2) / V734510 / Resist spray dispense system up to 30cP with filter and reservoirs
(2) / V723000 / Resist bottle holders
(2) / V723010 / Resist bottle adapters
(2) / V734520 / Pre wet dispense nozzle alta sprays
(2) / V734540 / BSR Dispense option alta sprays, 50ml
(2) / V734545 / Additional chuck vacuum lines
(2) / V745120 / Filter unit solvents
(1) / V736101 / Aqueous process module
(1) / V736111 / Programmable dispense arm AQ
(1) / V736135 / Substrate assembly R4-R6 AQ
(1) / V736300 / Puddle dispense system AQ
(1) / V736320 / Fan spray dispense system AQ
(1) / Q736320 / Fan spray dispense system AQ for 3rd line
(1) / V736340 / Topside rinse dispense AQ
(6) / V736390 / Flow detection sensors AQ
(1) / V745100 / Filter unit DI-water
(1) / V745110 / Filter unit AQ developer
(1) / V738030 / Nitrogen drying option
(1) / V740010 / Hot / Cool plate / Vacuum prime stack module
(2) / V744110 / Hot plate cassette 250° C proximities
(2) / V744230 / Cool plate cassette proximities
(1) / V744300 / Vacuum primer
(1) / 100000699 / Substrate assembly vacuum primer R2-R8
(1) / V744340 / Pressure tank system (5L Stainless steel / HMDS) / Bubbler
(1) / V744350 / Safety package HMDS
(1) / V826020 / JULABO FL601 TCU, 50 Hz
(3) / V760011 / Media storage stainless steels
(1) / V760120 / Pressure tank system (10L stainless steel bulk fill)
(2) / 100005184 / Pressure tank systems (5L PE bulk fill) KALREZ
(1) / V760240 / Waste canister (20L Stainless steel) quick
(1) / V772005 / Additional gas monitor
2013 vintage.
KARL SUSS/MICROTEC Gamma DSSP是一种为微加工而设计的光刻设备。它结合了光学和电气技术，以确保抗蚀层在基板表面的精确沉积。该系统由真空沉积室、真空操纵器、注射器单元和图桉面罩组成。沉积室设有高精度、气动操作的平台，可三维移动。此平台允许在紧邻掩码的地方放置可重复的晶圆。沉积材料，通常是先进的光刻胶制剂，如光刻胶聚合物，通过注射器机泵送。注射器工具可用于精确控制光敏材料的流量、剂量和图样。资产还包括一个模式面罩，通常由石英或金属制成，附着在沉积室上。该面膜用于限制沉积的光致抗蚀剂材料对某些区域的暴露。面膜的图桉是通过光刻产生的。集成激光曝光模型则提供紫外线，以增强暴露区域的激活。设备有一系列的电压设置，允许定制沉积时间和精确控制抗蚀层质量。抗蚀层在用户可选择的温度下"烘烤"，从而在各层之间形成物理、化学或电键。该系统还具有真空室的气动控制功能，可实现全过程的终极精度和可重复性。MICROTEC Gamma DSSP是一种先进的光刻装置，能够在基板表面沉积极薄、均匀、复杂的层。它将高精度、量身定制的注射器系统与光刻的精密图样技术相结合，以确保精确、可重复的结果。它是一种多用途的机器，为用户提供对沉积过程的全面控制，以用于各种微加工应用。
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