二手 OPTORUN OWLS-1800DV2H #293753765 待售

Optical sputter coater system Base plate fixture size: Ф 375 mm x T 5 mm Base plate rotating speed: 10~100 rpm Target size: Ф 142 x H 630 Ti (2) ICP Reaction sources: RF power supply 5 kW Transmission system: Double-arm vacuum mechanical arm Cathode power supply: (2) Bipolar MF power supplies: 24 kW (2) High pulse power supplies: 20 kW.