二手 SEMITOOL Raider #9018339 待售

Wafer backside etcher, 6" Configuration: Process: backside and bevel etch/clean Substrate: 6" Si with flats Voltage: 380 V, 3 phase, 50/60 Hz, 5 wire CE comp: yes S2 comp: yes Automation: Type: 2 open cassette Robot: STI single linear End effector: edge grip Pre-aligner: no Cabinet: Style: 2 chamber with WIP version 2 Material: PVC-C Exhaust: bottom Facilities: bottom Fire supp: eng req (no external comp) ULPA filters: standard (to cover both wafer handling area and chambers) Process module: CPC1/CPC2 backside layer etch Chamber: 8" capsule Rotor: 6" capsule I DRVHD: capsule I Auto: Raider L/R MFC on N2 and IPA (top/bottom) IPA vapor dry Delivery systems: Tank 1 Size: 20 L Style: bottom draw H/C: coils Circ: recirc/reclaim Filter: 5" 0.1 um Level sensor: 3 floats Pump: Levitronix BP-3 48 V Supply: bulk fill Delivery: CPC 1 & 2 Chem: dHF Chemical trunk line delivered to bottom of CPC1/CPC2 SMTL transducer for all liquids Drains: IPA, IW, HF Options: (2) Affinity heater/chillers Engineering required: Cabinet Elec pods Automation Process component integration Electrical Software Plumbing layout Gas flow monitoring and data logging Robot interface Manuals Chiller/heater, 50 Hz, European Chiller M75, 50 Hz, PD-2 2004 vintage.