二手 SSC BPE-2708-SP #9220820 待售
网址复制成功!
单击可缩放
ID: 9220820
晶圆大小: 8"
优质的: 2006
Gold plating machines, 8"
Plating mechanism: Fountain, face-down
Manual wafer load and unload
Solution: Non-cyanide, Au solution
Solution capacity: (14) Cups, 8"
Temperature control: Direct heating
Mechanism: PID Control
Temperature control range: Room temperature to ~70°C
Flow rate: Auto control by flow sensor, cup / Pump control mechanism
Plating tank: Laminate
Upper lid: PVC
Cup holder: HT-PVC and PPS, 8"
Upper lid arms: SUS Coated with PTFE
Upper lid open / Close: Air cylinder
Fountain pump: Polypropylene
Valve: PTFE AV valve, HT-PVC, PVC and PFA
Piping of Au solution: HT-PVC, Polypropylene and PFA
Piping of DIW and drain: HT-PVC, PVC, and PFA
Piping of exhaust: PVC
Plating unit: PVC
Cup location: (7) Lines x (2) cups
Fountain pumps: (14) MD-100FYK With inverter control: 8~50 L/min
With cup / Pump flow rate
Circulation pumps: (2) MD-100FYK With inverter control
With (2) circulation piping lines
Fountain filtration: (14) Sets of PP (housing and cartridge)
Circulation filtration: (2) sets of PP (housing and cartridge)
Solution level control: N2 level sensor for each solution tank
With (2) upper, lower, fixed, additive
Sensors: Temperature, leakage, flow rate, area
(4) Heaters, 3 kW
Power supply: Cabinet (Caster and adjuster)
Fixed electrical current
2-Channel switch: (2) 8~3000 mA (8 ~300 mA)
Precision: ±0.5 % by 300 mA
Control: Sequence control
Touch panel and PLC
Data recorded PC
(30) Programmable numbers
(90) Recipes per programmed number
Count current mod (mA / Hour)
Bump height uniformity: ≤ 5 % (10-15) points / Wafer
Bump height uniformity: ≤ 2 um - ≤3 um, 8" (80-120 points)
Flow rate: 35 L/min, no leakage from backside
Edge contact area / Cathode
No plating cup
2006 vintage.
SSC BPE-2708-SP Photoresist设备是一种先进的自动化精密激光曝光系统,旨在满足快速发展的制造技术的需求。它非常适合要求高精度、高细节分辨率的先进光刻应用。在其核心,单元配备了SSC专有的固态激光机。这种激光工具以各种可调节的频率、持续时间和能级产生高功率脉冲,可以精确准确地曝光光刻材料而不会造成损坏。资产还包括一对高分辨率相机系统,旨在监测和控制激光曝光过程。这保证了激光的每一次通过都精确地遵循预定的图样,从而产生均匀的光致抗蚀剂曝光。此外,该模型还包括一个自动化的物料处理设备因素。这使操作员能够在每个光刻作业中快速轻松地加载两个标准掩码,从而最大限度地提高吞吐量。物料处理系统确保在激光发射前可以精确定位口罩,从而产生高精度和重复性。该单元还包括一台高功率、能干的归档机。这使操作员能够存储光刻设置和参数,以便于召回,从而进一步提高吞吐量。该工具通过直观、易于使用的界面进行控制。该显示器包括对光刻进度的实时反馈,提供每个激光曝光步骤结果的视觉总结。总体而言,BPE-2708-SP Photoresist Asset是高级光刻应用的理想解决方桉,需要高精度和高细细分辨率。其强大的功能集和自动化的物料处理可实现高吞吐量,并确保每项工作都能获得可重复且一致的结果。
还没有评论