二手 TEL / TOKYO ELECTRON ACT 12 #9112795 待售
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ID: 9112795
晶圆大小: 8"
CRA Cassette Block Robotics Arms, 8"
Main Component Part Numbers:
CRA X Assembly Part No: CT2987-455715-W1
CRA 8" Fork Conversion Assembly Part No: CT2985-444227-W2
CRA Mapping LED Sensor Part No: CT2985-443032-W1
CRA Y Assembly Part No: CT2987-455713-W1
CRA Z Assembly Part No: CT2987-455716-W1
CRA Theta Assembly Part No: CT2987-455756-W1
CRA Electric Assembly Part No: CT2987-456574-W1
2987-455715-W1 ARM (ACT12 CRA-X-IPL)
CT2980-193234-11 BLOCK,SLIDE NP8099D005-2
CT2980-193235-11 BASE,FORK NP8099D002-2
CT2980-193236-11 HOLDER NP8099D006-1
CT2980-193237-11 STAND (1) NP8099D003-1
CT2980-193238-11 STAND (2) NP8099D004-1
CT2980-193239-11 COLLER,PULLEY NP8099D009-0
CT2980-193240-11 NUT NP8099D010-0
CT2980-193241-11 BLOCK,TENSION NP8099D012-1
CT2980-193242-11 BRACKET NP8099D013-1
CT2980-193243-11 COLLER,IDLER NP8099D015-0
CT2980-193244-11 BLOCK,MAPPING NP8099D016-1
CT2980-193245-11 STOPPER,END NP8099D017-0
CT2980-193246-11 STOPPER NP8099D018-0
CT2980-193247-11 BLOCK,IDLER NP8099D019-1
CT2980-193248-11 SHAFT NP8099D020-0
CT2980-193249-11 COVER,OUTER E NP8099D022-1
CT2980-193250-11 COVER,OUTER H NP8099D023-1
CT2980-193251-11 BRACKET NP8099D024-2
CT2980-193252-11 BRACKET AMP NP8099D025-2
CT2980-193253-11 BRACKET,SPCON NP8099D026-2
CT2980-193254-11 BRACKET,CYL NP8099D027-2
CT2980-193255-11 BRACKET,AMP NP8099D028-2
CT2980-193256-11 FLAG,MAPPING NP8099D29-1
CT2980-193257-11 BRACKET (HOME) NP8099D030-2
CT2980-193258-11 FLAG,X-AXIS NP8099D031-1
CT2980-193259-11 BRACKET (1) NP8099D032-2
CT2980-193260-11 BRACKET (2) NP8099D033-2
CT2980-193261-11 COVER,OUTER L NP8099D034-1
CT2980-193262-11 COVER,INNER B NP8099D035-2
CT2980-193263-11 COVER,INNER NP8099D036-2
CT2980-193264-11 GUIDE X-040-0
CT2980-193265-11 BELT X-042-0
CT024-016768-1 AIR CYLINDER CJ2B10-150A
CT028-002835-1 FITTING,TUBE KJL04-M5
CT024-011352-1 SPEED CONTROLLER AS1001F-04
CT024-013951-1 SPEED CONTROLLER TMH-04J HOLDER
CT028-002956-1 FITTING,TUBE M-5J
CT018-002437-1 LM GUIDE RSR9ZMC1+195LM
CT044-000098-1 SUPPORT,PCB SQ-5
CT2890-193266-11 BASE,X-AXIS NP8099D301-0
CT2980-193267-11 PULLEY ASSY NP8099D302-0
CT2980-193268-11 IDLER,TENSION NP8099D030-0
CT2980-193269-11 PIN NP8099D021-1
2985-444227-W2 CONVERSION (8") ASSY, FORK
CT2910-290041-12 8" TWEEZERS
CT310-392002-8 P HOLDER*
CT2910-415415-11 GUIDE,RIGHT
CT2910-415416-11 GUIDE,LEFT
CT2910-325388-12 BASE
CT1910-425613-12 BLOCK(SE)
CT1910-425614-12 BLOCK(RE)
CT2910-321121-11 STAND,RIGHT GUIDE
CT2910-321122-11 STAND,LEFT GUIDE
2985-443032-W1 SENSOR (8"C), MAPPING LED
CT2980-091699-11 SENSOR,MAPPING LED NP8074D200-0
2987-455713-W1 ARM (ACT12 CRA-Y-SHORT-IPL)
CT2980-193270-11 PLATE (1),SIDE NP8099E001-2
CT2980-193271-11 PLATE (2),SIDE NP8099E002-1
CT2980-193272-11 PLATE (END),S NP8099E004-2
CT2980-193273-11 PLATE (HOME),S NP8099E005-2
CT2980-193274-11 PLATE (END),B NP8099E013-1
CT2980-193275-11 PLATE (HOME),B NP8099E014-1
CT2980-193276-11 SUPPORT,CLAMP NP8099E009-1
CT2980-193277-11 BRACKET NP8099E010-0
CT2980-193278-11 BRACKET NP8099E011-0
CT2980-193279-11 CLAMP,BELT NP8099E015-0
CT2980-193280-11 STOPPER NP8099E020-1
CT2980-193281-11 STOPPER,HOME NP8099E021-1
CT2980-193282-11 BLOCK (1),MOTO NP8099E022-1
CT2980-193283-11 BLOCK (2),MOTO NP8099E023-1
CT2980-193284-11 PLATE,SPACE NP8099E012-1
CT2980-193285-11 PLATE,MOUNT NP8099E025-2
CT2980-193286-11 COVER (1),GUID NP8099E026-3
CT2980-193287-11 COVER (2),GUID NP8099E027-3
CT2980-193288-11 BRACKET,MOTOR NP8099E028-2
CT2980-193289-11 BRACKET NP8099E029-1
CT2980-193290-11 FLAG NP8099E030-0
CT2980-193291-11 BRACKET NP8099E031-2
CT2980-193292-11 COVER (2),BELT NP8099E033-1
CT2980-193293-11 COVER,MOTOR NP8099E032-2
CT2980-193294-11 COVER (1),BELT NP8099E034-1
CT2980-193295-11 SUPPORT,SIDE NP8099E035-2
CT2980-193296-11 SUPPORT,CENTE NP8099E036-1
CT2980-193297-11 GUIDE (1) NP8099E037-1
CT2980-193298-11 GUIDE (2) NP8099E038-1
CT2980-193299-11 COVER (1) NP8099E039-1
CT2980-193300-11 COVER (2) NP8099E040-1
CT2980-193301-11 COVER,SIDE NP8099E041-1
CT2980-193302-11 SUPPORT (1),CO NP8099E042-1
CT2980-193303-11 SUPPORT (2),CO NP8099E043-1
CT2980-193304-11 GUIDE Y-055-0
CT023-002464-1 BELT,TIMING 345-3GT-12
CT2980-193305-11 BELT Y-060-1 (2995100137114
CT047-003149-1 FLEXIBLE DUCT 25.2-055-NP-21-22B
CT2980-193306-11 SHEET NP8099E045-1 (299510013714
CT2980-193307-11 BASE,GUIDE NP8099E301-0
CT2980-193308-11 PULLEY (HOME) NP8099E302-0
CT2980-193309-11 PULLEY (END) NP8099E303-0
CT2980-193310-11 BRACKET NP8099E044-2
2987-455716-W1 ARM (ACT12 CRA-Z-IPL)
CT2980-193311-11 SUPPORT (1),SI NP8099F002-2
CT2980-193312-11 SUPPORT (2),SI NP8099F003-2
CT2980-193313-11 BASE (1),GUIDE NP8099F004-2
CT2980-193314-11 BASE (2),GUIDE NP8099F005-2
CT2980-193315-11 COVER (1) NP8099F006-1
CT2980-193316-11 COVER (2) NP8099F007-1
CT2980-193317-11 SUPPORT,COVER NP8099F008-1
CT2980-193318-11 COVER (3) NP8099F009-1
CT2980-193319-11 BRACKET NP8099F010-1
CT2980-193320-11 SHUTTER NP8099F011-0
CT2980-193321-11 SUPPORT (1),CA NP8099F012-2
CT2980-193322-11 SUPPORT (2),CA NP8099F013-1
CT2980-193323-11 SUPPORT (3),CA NP8099F014-1
CT2980-193324-11 MOUNT (1),CABL NP8099F315-0
CT2980-193325-11 MOUNT (3),CABL NP8099F316-0
CT2980-193326-11 CATERPILLAR Z-230
CT023-002463-1 BELT,TIMING 288-2GT-15
CT2980-193327-11 BASE,Z-AXIS NP8099F301-0
CT2980-193330-11 COVER,BELT N\P8099F020-0
CT2980-193328-11 MOUNT (4),CABL NP8099F304-0
CT2980-193329-11 BALL SCREW UNIT Z-32-0
2987-455756-W1 ARM (ACT12CRA-THETA-IPL)
CT2980-193331-11 BASE,MOTOR NP8099G001-2
CT2980-193332-11 SUPPORT NP8099G003-1
CT2980-193333-11 SUPPORT (2) NP8099G004-1
CT2980-193334-11 STOPPER NP8099G006-1
CT2980-193335-11 STOPPER NP8099G007-0
CT2980-193336-11 PIN NP8099G008-0
CT2980-193337-11 COVER NP8099G009-2
CT2980-193338-11 MOUNT (1),CABL NP8099G303-0
CT2980-193339-11 BRACKET NP8099G011-1
CT2980-193340-11 BRACKET NP8099G012-1
CT2980-193341-11 BRACKET NP8099G013-1
CT2980-193342-11 SHUTTER NP8099G014-2
CT2980-193343-11 BRACKET NP8099G015-1
CT2980-193344-11 BRACKET NP8099G016-2
CT2980-193497-11 SUPPORT (3) NP8099G017-0
CT044-002136-1 SUPPORT, PCB WLS-03-0
CT2980-193345-11 BASE,THETA-AX NP8099G301-0
CT2980-193346-11 SPACER,MOTOR NP8099G302-0.
TEL/TOKYO ELECTRON ACT 12是一种光致抗蚀剂设备,适用于半导体工业中的多种工艺。该系统高度可靠,并结合了一些改进现有系统的创新功能。光刻系统非常适合光刻和蚀刻等光刻应用。该装置采用最先进的成像机,可选择镜片选择、光束消光、A-Si/Gas等离子体和Optic Cross Scan,并配有经过优化的自动过程控制工具。资产有一个集成的光束消隐选项,允许一次在晶圆上的单个物体上应用光刻胶。这防止了不同的掩模对齐器的潜在交叉污染,因为没有光致抗蚀剂被应用到整个晶片在一个步骤。该模型还采用了a-Si/气体等离子体工艺,使光刻系统的性能更高。此功能可更精确地控制激光束直径、曝光时间和标线尺寸,从而实现更好的稳定性和精确的阵列。此外,该设备还配备了高密度清晰度测量技术,在计量测量中提供了卓越的准确性和可重复性。这项技术有助于提高整个过程的精度,例如深度控制和焦点监测。最后,系统还有一个光学交叉扫描技术,设计用于多种锯如台阶和重复光刻。由于其实时图像传输和更高的控制速度,该装置提供了更高的吞吐量和更高的产量。TEL ACT 12光刻机使半导体制造商能够优化其工艺,以便生产出满足市场需求的高质量产品,同时考虑到可靠性。其高性能成像工具、光束遮挡、a-Si/Gas等离子体和光学交叉扫描,以及高密度清晰度测量技术,为您的流程带来更大的灵活性和准确性。
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