二手 TEL / TOKYO ELECTRON Clean Track ACT 12 #9106173 待售

ID: 9106173
晶圆大小: 8"
Process Block Robotic Arms, 8" PRA X-Axis Assy: CT2985-469941-W2 - X Axis Assy (ACT 12), Common CT2910-200980-13 - X Base (300) CT2910-401477-11 - X Side Plate (Qty 2) CT2910-401979-11 - Bracket, Motor (Qty 3) CT2910-408714-11 - Sensor Bracket (Qty 3) CT2910-405673-11 - X3 Plate CT2910-405674-11 - X3 Plate CT2910-405672-11 - Guide Block (Qty 3) CT2910-403428-11 - Belt Block (Qty 3) CT2910-401512-11 - Belt Block (Qty 3) CT2910-405691-11 - Sensor Shutter (Qty 3) CT2910-405675-12 - X1 Block CT2910-405676-12 - X1 Block CT2910-405677-12 - X2 Block (Qty 2) CT2910-403433-12 - X2 Block (Qty 2) CT2910-403533-12 - X3 Block (Qty 2) CT2910-307254-11 - X2 Plate CT2910-307255-11 - X2 Plate CT2910-402169-11 - X2 Plate CT2910-402170-11 - Plate CT2910-400001-13 - WAF Sensor Cover CT2910-400743-11 - WAF Sensor Bracket CT2910-403435-11 - C Cover (1) CT2910-490117-11 - C Cover (2) CT2910-401535-11 - Nut Plate (Qty 2) CT2910-401550-11 - Cover Bracket (Qty 4) CT2910-403488-11 - X Cover (Qty 2) CT2910-403436-11 - X Cover (Qty 4) CT2910-303738-11 - X Cover CT2910-303739-11 - X Cover (Qty 20) CT2910-303740-11 - X Cover CT2902-400038-11 - Pulley (3-20) (Qty 3) CT2902-400061-11 - LM Guide (Qty 6) CT2910-310059-11 - Bracket (Qty 2) CT2910-407741-11 - Cable Rail (Qty 3) CT2910-408715-11 - Stopper Block (Qty 12) CT2910-410980-11 - Cover, Belt (Qty 3) CT023-001515-1 - Belt, Timing 1290-3GT-6 (Qty 3) CT023-001777-1 - Belt, Timing 192-3GT-6 (Qty 3) CT044-001407-1 - Support, PCB SA6-43 (Qty 4) CT044-001058-1 - Support, PCB SA6-20 (Qty 8) CT044-000044-1 - Support, PCB EM-3 (Qty 2) CT2986-402862-W2 - 12" PRA X Axis Assy: CT2986-401770-11 - 12" X1 Motor Assy CT2986-401771-11 - 12" X2 Motor Assy CT2986-401772-11 - 12" X3 Motor Assy CT2986-401773-11 - 12" X Home Sensor Assy CT2986-427122-11 - Sensor, 12 Light #01 680 (Assy) CT2986-427123-11 - Sensor, 12 Detect #01 620 (Assy) CT2986-401776-11 - 12" WAF Signal Cable CT2985-442959-W1 - Base (ACT 12) Assy, PRA 8": CT2910-320885-11 - Plate, Upper CT2910-321411-11 - Cover, X CT2910-316994-11 - Frame CT2910-316995-11 - Plate, Upper CT2910-316996-11 - Plate, Lower PRA Z Axis Assy: CT2985-201532-W3 - 300Z Axis Assy CT2910-301544-11 - Top Plate CT2910-100241-12 - Z Main Base CT2910-100242-12 - Z Main Base CT2910-100248-12 - Z Side Base CT2910-100249-12 - Z Side Base CT2910-100250-13 - Z Side Base CT2910-100251-12 - Z Side Base CT2910-301646-12 - Outer Cover (Qty 2) CT2910-100243-12 - Bottom Base CT2910-301655-11 - Z Support CT2910-308116-11 - Z Support CT2910-401047-11 - Position Pin (Qty 4) CT2910-401662-11 - Stopper CT2910-490025-12 - Stopper (Z) (Qty 4) CT2910-490150-12 - Support Arm CT2910-301503-12 - Support Arm CT2910-301522-11 - Support Plate CT2910-301523-12 - Support Plate CT2910-400677-11 - Support Bar CT2910-301524-11 - Guide Block CT2910-301525-11 - Guide Block CT2910-301540-12 - Fan Box (Qty 2) CT2910-401593-11 - Commutation Plate (Qty 2) CT2910-401590-11 - Belt Block CT2910-401591-11 - Belt Block CT2910-313316-11 - Duct Plate CT2910-313317-11 - Duct Plate CT2910-406173-11 - Cable Clamp (Qty 2) CT2910-401594-11 - Belt Clamp (Qty 2) CT2910-401595-11 - Belt Clamp (Qty 6) CT2910-401033-11 - Motor Base CT2910-401034-11 - Block CT2910-300965-11 - Motor Block CT2902-400010-11 - Z Motor Pulley CT2910-300970-11 - Fan Bracket (Qty 4) CT2910-401299-11 - Cable Clamp (Qty 10) CT2910-401753-11 - X Board Bracket CT2910-401592-11 - Sensor Bracket CT2910-490152-11 - Shtr. Z (Qty 2) CT2910-301654-11 - Cable Guide (Qty 2) CT2910-401663-11 - Cable Bracket CT2910-401687-12 - Flat Rail (5-15) CT2910-401664-11 - Cover Bracket (Qty 6) CT2910-401665-11 - Cover Bracket (Qty 2) CT2910-401668-12 - Cover Support (Qty 4) CT2910-301657-11 - Cover Bracket (Qty 2) CT2910-301658-11 - Cover Bracket CT2910-404714-11 - Position Pin (Qty 2) CT018-001971-1 - Linear Way LWHS20C2R1420B-LR (Qty 2) CT023-000961-1 - Belt, Timing 3000-5GT-30 Open CT023-001873-1 - Belt, Timing 456-3GT-9 (Qty 2) CT023-001872-1 - Belt PE-100-2 45*3100C (Qty 3) CT044-001340-1 - Support, PCB FB6-10 (Qty 14) CT2986-402862-W2 - 12" PRA X Axis Assy: CT2986-402847-11 - 12" X Fan Assy (Qty 4) CT2986-401792-11 - 12" X Fan Cable (Qty 4) CT2981-600409-11 - PRA X Board CT2986-401737-W2 - 12" PRA Z Axis Assy: CT2986-401743-11 - 12" Z Motor Assy CT2986-401832-11 - 12" Brake Signal Cable CT2986-401744-11 - 12" Z Home Signal Cable CT2986-401745-11 - 12" Z Fan1 Assy (Qty 6) CT2986-401746-11 - 12" Z Fan2 Assy (Qty 4) CT2986-401747-11 - 12" Z Fan Harness1 CT2986-401748-11 - 12" Z Fan Harness2 CT2986-401749-11 - 12" Z Fan Harness3 CT2986-401750-11 - 12" Z Fan Harness4 CT2986-408336-11 - 12" Brake Off Harness CT2981-600410-11 - PRA Z Board CT2981-600333-11 - Sensor Brd. L Assy PRA Z Cover Assy: CT2985-401531-W2 - Z Cover Assy CT2910-415404-12 - Cover, Z (Qty 3) CT2910-301668-11 - Z Cover CT2910-301669-11 - Z Cover (Qty 2) CT2910-301670-11 - Z Cover CT2910-301671-11 - Z Cover CT2910-301672-11 - Z Cover CT2910-301673-11 - Z Cover CT2910-301674-12 - Z Cover CT2910-301675-11 - Z Cover CT2910-301676-11 - Z Cover CT2910-301699-11 - Z Cover (Qty 2) CT026-100972-1 - Grommet C-30-NG-79-A-1 CT2987-459316-W1 - Sensor Assy, Z Axis (ACT 12): CT2985-489564-W1 - Fixture Assy, Z Axis (ACT12) CT2986-467717-W1 - Sensor, PRA Belt 12 #01 (Qty 2) PRA Theta Axis Assy: CT2985-403791-W1 - 12 Theta Axis Assy CT2910-301722-11 - Motor Base CT2910-402634-13 - Theta Stopper CT2910-402635-11 - Stopper (Qty 2) CT2910-403661-11 - Stopper Base CT2910-401712-11 - Sensor Bracket CT2910-300200-13 - Board Bracket CT2910-301726-11 - Cover CT2910-301727-11 - Cover CT2910-301724-11 - Cover Bracket CT2910-309253-11 - Cover Bracket CT2910-301737-11 - Cover Bracket CT2910-301738-11 - Cover Bracket CT2910-302033-11 - Support Bracket (Qty 2) CT2910-400199-11 - Holder Plate CT022-000903-1 - Bearing 5002DDUU76 LG2L (299880001011 CT2985-403808-W1 - 12 PRA 4C Base Assy: CT2910-100477-13 - 12 PRA-HP Base (4C) CT2910-300496-11 - Support Bar PRA Z, Theta Cable Assy: CT2987-400810-W2 - 12 Z Cable Assy1 CT2986-401738-11 - 12" PRA Z Axis Cable Assy1 CT2985-401549-W1 - Z Cable Assy (25L) CT2987-400811-W2 - 12 Z Cable Assy2: CT2986-401740-11 - 12" PRA Z Axis Cable Assy2 CT2985-401549-W1 - Z Cable Assy (25L) CT2987-400812-W1 - 12 Theta Cable Assy: CT2986-401742-11 - 12" PRA Theta Axis Cable Assy CT2985-401570-W2 - Theta Cable Assy PRA Theta Axis Cable Assy: CT2986-401739-W1 - 12" PRA Theta Axis Assy CT2986-402876-14 - 12" Th. Motor Assy CT2985-401759-11 - 12" Th. Fan Cable1 CT2986-401760-11 - 12" Th. Fan Cable2 CT2986-401761-11 - 12" Th. Fan Cable3 CT2986-401762-11 - 12" Th. Fan Cable4 CT2986-401763-12 - 12" Th. Fan Assy (Qty 4) CT2986-401764-11 - 12" Th. Home Signal Cable CT2986-401765-11 - 12" Brake Off Cable2 CT2981-600333-11 - Sensor Brd. L Assy CT2981-600408-12 - PRA Base Board PRA Pincette Assy: CT2985-432270-W1 - Fork (ACT 12), PRA 8" CT2910-207761-11 - Fork(8"), ACT12 CT2985-40770-W1 WAF Block Assy: CT2904-390016-11 - 8 Inch Standard Block (299880028811 CT020-002765-1 - Bind Screw M2.6*5 SUS304 (Qty 2) Missing main controller.
TEL/TOKYO ELECTRON CLEan Track ACT 12是一款最先进的光刻设备,具有优化的特征尺寸。它利用先进的主动夹紧技术在其设计,使高灵敏度和稳定性的光刻膜。来自TEL的TEL Clean Track ACT 12提供了一个经过优化的系统,可以准确、一致地处理具有极低缺陷率的光致抗蚀剂和其他基板。TOKYO ELECTRON CLEAN TRACK ACT 12单元控制和控制从预处理到晶圆处理/抵抗涂层的整个光刻过程。它的顶级功能包括一台专有的激光制图机,它可以将设计精确地打印到晶圆上。独特的激光对准工具还确保了使用可变原始设计的一致性能。资产还包括一个后图案IC清洁模块,以便在涂层后轻轻清洗晶片。该模型采用纳米流体跟踪设备进行设计,以防止阵列解决方桉的湍流和失调,以及提供均匀、干净边缘的先进、可变的边珠去除。此外,Clean Track ACT 12集成了一个智能跟踪系统,用于查明晶圆上的缺陷并准确清除它们而不会造成损坏。TEL/TOKYO ELECTRON Clean Track ACT 12还集成了一个自动跟踪的标线对准单元(ATRS),以提供快速可靠的图样精度,甚至跨越大型玻璃板。该机还结合了监控抗蚀剂质量的功能,以识别更深层次的缺陷。此工具与质量保证程序集成在一起,该程序可持续监控底物条件,以确保生产的抗蚀剂具有一致、优异的性能。TEL Clean Track ACT 12光抗蚀剂资产的设计考虑到了人体工程学上的便利;它的设计使其能够适应用户友好的操作,而无需调整复杂的对齐设置。其自动晶圆处理模型还允许使用各种输入模式对小缺陷进行局部清理。TOKYO ELECTRON CLEan Track ACT 12以极具竞争力的价位提供无与伦比的性能。凭借其无与伦比的能力,这款设备非常适合所有半导体工艺应用。它能够以最高精度水平处理先进的半导体器件。安装Clean Track ACT 12光刻系统后,任何企业都可以在最快、最安全、最可靠的环境中提供一流的产品。
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