二手 TEL / TOKYO ELECTRON CS500 #9293647 待售

Coater / (2) Developer system For LCD flat panel display manufacture Track runs Gen 2 (370 mm x 470 mm) panels Handle (4) cassettes (3) Robots and transfer stations SCR / (4) Cools / (7) L Ovens / HMDS Glass substrate: Min: 300 mm x 400 mm Max: 400 mm x 500 mm Module includes: (7) Hot plates (4) Chill plates HMDS Vapor prime Megasonic scrubber Edge bead remover Specification: Main controller: NEC 98" Series Loader / Unloader: (4) Uni-cassettes (4) Spin coater heads (Coater / (2) Developer / SCR) Coater unit specification: Function for one coater head: Coater cup: Standard cup Photo resist line: (2) Nozzles Back side rinse RRC Fuction P/R Drain: Local drain 10L tank Drain tank with pump P/R Supply allocation: Bottle / Nozzle Standard function: Cup exhaust flow monitor with interlock Dummy dispense control panel Chemical flow detection with flow meter sensor Solvent supply: (5) Gal canisters (2) Tanks auto change (Local supply) DEV Unit specification: Function for developer unit: DEV Cup: TEL Standard cup DEV Line: Nozzle for etch unit Back side rinse Top rinse function EV Drain: Facility drain DEV Supply allocation: Supply from facility with 200 liter tank CS500 Standard function cup exhaust flow monitor with interlock Dummy dispense control panel Chemical flow detection with flow meter sensor SCR Unit specification: Function for SCR unit: SCR Cup: Standard cup Dl Line: Nozzle for etch unit with mega-sonic Back side rinse Top rinse function D.I Drain: Facility drain CS500 Standard function: Cup exhaust flow monitor with interlock Dummy dispense control panel Chemical flow detection with flow meter sensor 1997 vintage.