二手 TEL / TOKYO ELECTRON Spare parts for Clean Track II / Mark Vz / Mark V #293609150 待售
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ID: 293609150
Qty / Pat number / Description
(2) / 2504189-0001 / Load plates
(3) / 2507445-001 / Load plates HD5
(4) / 2507441-0001 / Stop plates
(1) / 2503833-001 / Mirror plate
(10) / 2509937 / Integrator alignment targets Type-x
(1) / 2506582 / -
(1) / 2509413 / -
(2) / 2507441 / Stop plate, SVGA-X
(1) / - / Lock plate
(1) / 2507438 / SVGA-X 7/12/07 plate
(1) / 2509940 / Integrator alignment target 98 DPW
(1) / DT31254102 / Plate
(1) / - / Contol panel slurry speed control
(1) / - / AC/DC Relay supply panel
(1) / - / Flow meter system A
(1) / - / Flow meter, mO2 O24 water L/min
(1) / - / Purge gas control panel.
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