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RAITH 150 #293665107

RAITH

150

E-Beam lithography system Resolution: 50nm Ultra-high-resolution Automated waferscale e-beam writing
3
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RAITH 150 #293662702

RAITH

150

E-Beam lithography system.
93
RAITH 150 #293650472

RAITH

150

E-Beam lithography system CCD Camera Resolution: PMMA 20 nm (100 nm) at 20 kV Periodicity: 80 nm in
82