二手 AMAT / APPLIED MATERIALS P5000 #115991 待售

MXP Etcher, 6" (3) Chambers Mainframe type: Mark II I/O Wafer sensor: No Installation: Stand alone Expanded VME: Yes Mini-Controller: Yes Phase 3 robot: Yes Phase 3 cassette handler: Yes Storage elevator: (8) Slots Cassette platform: Standard Wafer orienter: No L/L Chamber bolt down lid: No L/L Particle reduction kit: No Gas panel: MFC Unit UFC-1100A Gas panel type: Twelve lines main: No Twenty-Eight line onboard: No Standard gas panel (28 line capability): Yes Remote gas panel: No Chamber A: MFC Size gas cal gas 300 sccm CF4 N2 100 sccm Ar N2 100 sccm O2$ O2 50 sccm O2 N2 Chamber C: MFC Size gas cal gas 300 sccm CF4 N2 100 sccm Ar N2 100 sccm O2$ O2 50 sccm O2 N2 Chamber D: MFC Size gas cal gas 300 sccm CF4 N2 100 sccm Ar N2 100 sccm O2$ O2 50 sccm O2 N2 Process application: Chamber A: Etch MxP Chamber C: Etch MxP Chamber D: Etch MxP System electronics: Slot # Description 1 Mini SBC 2 SBC 3 SEI 4 MIZER: No 5 AI 6 AO 7 Video 8 AO 9 AI 10 Stepper 11 Stepper 12 Stepper 13 Stepper 14 DI/DO 15 DI/DO 16 DI/DO 17 DI/DO 18 DI/DO: No 19 DI/DO: No 20 DIO: No Floppy drive 3.5 Chambers A, C and D: Chamber type (Specify Mark II, MxP+, CVD or other): MxP Lid type (Specify STD, EGEC, BDEC, Uni-Lid or other): STD Chamber rough line Chamber airline Chamber interconnect PCB Heat exchanger QD fitting NESLAB facilities plumbing Slit valve assembly Remington hinge slit valve Backing pump circuit breaker RF Generator power outlet RF Generator circuit breaker Magnet driver (If present, Rev#) Lamp driver (If present, Rev#): No RF Match Turbo controller Turbo flow meter: No Turbo pump / Controller type Turbolink NT340M: Leybold Gate valve: No Chamber vent valve Remote frame: Primary pump frame: No Secondary pump frame: No Stacked remote frame: Yes Stacked remote frame contents: AMAT (3) RF Generators (1) Heat exchanger Type of hose fittings: QDC RF Generators: Chamber A: ENI 12A Chamber C: ENI 12A Chamber D: ENI 12A 1991 vintage.