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Metal etcher, 8" (3) ALCATEL Dry pumps (2) MxP Chambers ASP Chamber Main process modules: Chamber A
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TEOS CVD Systems, 8" (3) Deposition Precision Liquid Injection System (PLIS) chamber Sputter etch ch
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PECVD System, 8" Process: SA-BPSG TEOS with (3) CVD Chambers 1997 vintage.
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CVD System, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" Clamp 8 Slots elevator
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CVD System, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" Clamp 8 Slots elevator
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CVD system, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" clamp 8-Slots elevator
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CVD System, 6" Robots: Phase-III Standard O-Rings 8-Slots elevator (2) CRT Monitors AC Rack: 1 Shrin
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CVD System, 8" VME Type: Hard disk 21-Slots controller SBC Board type: V21 Synergy VGA Video board
384
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Etcher, 8" Orient MxP (Optima type) (3) Poly chambers Does not include pump or chiller 2013 vintage.
348
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PECVD System, 6" (2) DhL Process chambers Missing parts: Throttle valves Forelines ATM Sensor.
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PECVD System, 6" (3) Delta DhL process chambers Missing parts: Manometer (2) Lamp housings Loadlock
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Etcher, 8" Chamber A and B: MxP Metal Chamber D: Strip Mark II Mainframe 29 Slots storage elevator H
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SACVD System (3) LH Chambers (A / B / C) SPUT MKII (D) Ozonator rack AMAT0 HX NESLAB HX300 (3) Ozone
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