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PECVD System, 8" Process: SA-BPSG TEOS with (3) CVD Chambers 1997 vintage.
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CVD System, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" Clamp 8 Slots elevator
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CVD System, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" Clamp 8 Slots elevator
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CVD system, 6" SV21 SBC Board Main frame type: Mark-II Cassette indexer, 6" clamp 8-Slots elevator
288
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CVD System, 6" Robots: Phase-III Standard O-Rings 8-Slots elevator (2) CRT Monitors AC Rack: 1 Shrin
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CVD System, 8" VME Type: Hard disk 21-Slots controller SBC Board type: V21 Synergy VGA Video board
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CVD System Generator 5000 KASHIYAMA SD60VT Dry pump With fire extinguisher 0010-76036 Mini controlle
290
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Etcher, 8" Orient MxP (Optima type) (3) Poly chambers Does not include pump or chiller 2013 vintage.
273
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AMAT / APPLIED MATERIALS
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PECVD System, 6" (2) DhL Process chambers Missing parts: Throttle valves Forelines ATM Sensor.
327
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AMAT / APPLIED MATERIALS
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PECVD System, 6" (3) Delta DhL process chambers Missing parts: Manometer (2) Lamp housings Loadlock
245
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Etcher, 8" Chamber A and B: MxP Metal Chamber D: Strip Mark II Mainframe 29 Slots storage elevator H
332
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TEOS CVD Systems, 8" (3) Deposition Precision Liquid Injection System (PLIS) chamber Sputter etch ch
303
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