二手 AMAT / APPLIED MATERIALS P5000 #293758508 待售
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ID: 293758508
晶圆大小: 8"
Metal etcher, 8"
(3) ALCATEL Dry pumps
(2) MxP Chambers
ASP Chamber
Main process modules:
Chamber A
Metal etch B
Strip D
Expanded VME
Phase III Robot
Phase II Cassette
Mark II Main frame
(29) Slot Storage Elevator
Independent helium cooling
Sub modules:
AC Remote frame
Digital cables
Analog cables
ASTEX Microwave
Heat exchanger AMAT
ENI 12A RF generators
ENI 12B RF generators
Emergency interlock cables.
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