二手 AMAT / APPLIED MATERIALS P5000 #9164732 待售

Etcher, 6" Mainframe configuration: Mainframe type: Mark II I/O Wafer sensor: Yes Software revision level: TBD Expaneded VME: Yes Mini-controller: Yes Phase 3 Robot: Yes Phase 3 cassette handler: Yes Storage elevator (8) Slots Cassette platform: Standard Wafer orienter: No L/L Chamber bolt down lid: No L/L Particle reduction kit: No Gas Panel: MFC manufacturer / model: UFC-1100A Gas panel type: Twelve lines main: No Twenty-eight line onboard: No Standard gas panel (28 Line capability): Yes Remote gas panel: No Chamber A MFC Size Gas Cal Gas Gas 1 slm O2 N2 Gas 2 slm O3 He Gas 3 slm C2F6 N2 Gas 3 slm NF3 N2 Gas 200 sccm N2 N2 Gas Gas Gas Chamber B MFC Size Gas Cal gas Gas 1 slm O2 N2 Gas 2 slm O3 He Gas 3 slm C2F6 N2 Gas 3 slm NF3 N2 Gas 200 sccm N2 N2 Gas Gas Gas Chamber C MFC Size Gas Cal gas Gas 300 sccm CF4 N2 Gas 100 sccm Ar N2 Gas 100 sccm O2$ O2 Gas 50 sccm O2 N2 Gas Gas Gas Chamber D MFC Size Gas Cal gas Gas 300 sccm CF4 N2 Gas 100 sccm Ar N2 Gas 100 sccm O2$ O2 Gas 50 sccm O2 N2 Gas Gas Gas Hot box configuration: Hot box configuration: Phase IV Ampoule 1: Yes Ampoule 2: No Ampoule 3: No Ampoule 4: No Ampoule 5: No Ampoule 6: No Ampoule 7: Yes Process kit configuration: Process application: Chamber A: CVD TEOS Chamber B: CVD TEOS Chamber C: Etch MxP Chamber D: Etch MxP System electronics: Slot # Description 1 MINI SBC: Yes 2 SBC: Yes 3 SEI: Yes 4 MIZER: No 5 AI: Yes 6 AO: Yes 7 VIDEO: Yes 8 AO: Yes 9 AI: Yes 10 STEPPER: Yes 11 STEPPER: Yes 12 STEPPER: Yes 13 STEPPER: Yes 14 DI/DO: Yes 15 DI/DO: Yes 16 DI/DO: Yes 17 DI/DO: Yes 18 DI/DO: No 19 DI/DO: No 20 DIO: No Floppy drive: 5 ¼ Chamber position dependent configurations: Chamber A: Chamber type: CVD Lid: STD Chamber rough line: Yes Chamber airline: Yes Chamber interconnect PCB: Yes Heat exchanger QD Fitting: Yes Neslab facilities plumbing: Yes Slit valve assembly: Yes Reminton hinge slit valve: Yes Automatic control gate valve: No Backing pump circuit breaker: Yes RF Generator power outlet: Yes RF Generator circuit breaker: Yes Magnet driver: No Lamp driver: Yes RF Match: Yes Turbo controller: No Turbo flow meter: No Gate valve: No Chuck type: Other susceptor Chamber B: Chamber type: CVD Lid type: STD Chamber rough line: Yes Chamber airline: Yes Chamber interconnect PCB: Yes Heat exchanger QD fitting: Yes Neslab facilities plumbing: Yes Slit valve assembly: Yes Reminton hinge slit valve: Yes Automatic control gate valve: No Backing pump circuit breaker: Yes RF Generator power outlet: Yes RF Generator circuit breaker: Yes Magnet driver: No Lamp driver: Yes RF match: Yes Turbo controller: No Turbo flow meter: No Gate valve: No Chamber vent valve: Yes Chuck type: Other susceptor Chamber C: Chamber type: MxP Lid type: STD Chamber rough line: Yes Chamber airline: Yes Chamber interconnect PCB: Yes Heat exchanger QD fitting: Yes Neslab facilities plumbing: Yes Slit valve assembly: Yes Reminton hinge slit valve: Yes Automatic control gate valve: Yes Backing pump circuit breaker: Yes RF Generator power outlet: Yes RF Generator circuit breaker: Yes Magnet driver: No Lamp driver: Yes RF match: Yes Turbo controller: Yes Turbo flow meter: No Turbo pump / controller type: Leybold Gate valve: No Chamber vent valve: Yes Chamber D: Chamber type: MxP Lid type: STD Chamber rough line: Yes Chamber airline: Yes Chamber interconnect PCB: Yes Heat exchanger QD fitting: Yes Neslab facilities plumbing: Yes Slit valve assembly: Yes Reminton hinge slit valve: Yes Automatic control gate valve: Yes Backing pump circuit breaker: Yes RF Generator power outlet: Yes RF Generator circuit breaker: Yes Magnet driver: Yes Lamp driver: No RF match: Yes Turbo controller: Yes Turbo flow meter: No Turbo pump / controller type: Leybold Gate valve: No Chamber vent valve: Yes Remote frame: Primary pump frame: No Secondary pump frame: No Stacked remote frame: yes Stacked remote frame contents: Heat exchanger Ozone generator (4) RF generators Number of heat exchanger: 1 Water hoses: No Hose fittings: QDC Backing Pumps: LL Chamber: No Chamber A: No Chamber B: No Chamber C: No Chamber D: No RF Generators: Chamber A: ENI 12A Chamber B: ENI 12A Chamber C: ENI 12A Chamber D: ENI 12A 1992 vintage.