二手 AMAT / APPLIED MATERIALS P5000 #9180686 待售
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已售出
ID: 9180686
PECVD System
Spare parts:
Qty P/N Description
Cabinet 1: Shelf 1
(2) 0020-10752 Pumping plate 4,5,6" silane/nitride
(0) - 5 Hole pumping ring
(5) 0020-09316 Plate, blocker 150 MM teos
(1) - Plate, blocker 150 MM Silane
(11) 0020-10771 Perf blate, 150 MM Oxide
(4) 0020-10119 Showerhead CVD nitride rounded shoulder
(1) 0020-10119 Showerhead CVD nitride beveled shoulder
(3) 0020-10941 Isolater, Teflon ring (Nitride)
(2) 0020-10941 Isolater, Teflon ring (TEOS)
Shelf 2:
(3) 0020-10059 Ring, wafer lift
(10) 3700-02455 I/O Door oring
(0) 0150-09389 Cable assy,heater liquid source
(1) 3700-01033 Manifold output plate
(3) AS-568A K121 Teos iso valve oring
(6) AS-568A K030 Teos iso valve oring
(1) FS-V11 Motion sensor
(2) FS-V12 Motion sensor
(1) FS-V31C Motion sensor
(1) FU-95 Motion sensor
(1) - Delrin, focus ring
(1) 0020-09885 Isolater, delrin ring
(9) 0015-09232 Adjustment screw
(1) - Ceramic, focus ring
(3) 0010-60011 Susceptor assy(teos)
(5) 0200-09021 Shield, 150mm
(0) 0200-10193 Nitride shield
(1) 0020-09604 Single cfg(gas block)
Shelf 3:
(5) 0200-09158 Heater window
(5) 0150-09097 Cable assembly for heater lamp
(17) 3690-03638 Set screw for lamp modules
(9) 3790-01219 Insulators for lamp modules
(277) 1001820 Ushio 1000w lamp
Shelf 4:
(3) 0010-09341 Wafer lift
(1) 0010- 30029 (Primex) p chuck lift rebuild
(1) 0010-09341 Wafer lift
(4) 0010-09340 Susceptor lift
(1) 0010-09340 Susceptor lift
(1) 0010-09750 Rf match
Shelf 5:
(1) 0140-09244 Teos ampule
(1) 0010-09237 Heater module,basic
(4) 3700-01739 Oring
(1) 3700-01120 Oring kit for robot
(2) Type 0536 TC
(4) 167cv75 Oring
(1) D009510059 Oring
(3) 275V75 Ceramic tube o-ring
(3) 884V75 Oring
(1) 265V75 Oring
(9) 233V75 Oring
Misc lift parts
Cabinet 2: Shelf 1:
(2) 0200-09664 Window slit,al203
(3) 0020-09545 Filter, slit-window, cvd
(0) 0030-00195 Large face seal
(0) SS-SVCR4 Metering valve
(9) - Teos board connector female 3 pin
(8) - Teos board connector male 3 pin
(7) 0020-30533 Screw susceptor
(1) 0240-76545 Isolation valve rebuild kit kalrez
(200) - 6-32 x 5/16 skt ni plated
(200) - 4-40 x 5/8 skt ni plated
(4) 3630-01017 E clips
(2) 0190-09454 Endpoint detector
(30) 0015-09329 Screw mach btn hd 6-32 x 3/8 hex skt sst
Shelf 2:
(0) SS-BNV51-C Nupro valve vcr f-f
(1) SS-4TF-VCR-40 Nupro bottom actuator
(2) 0020-10921 Spacer wafer/susceptor lift
(12) - Spacer wafer/susceptor lift
(1) 0200-09035 Solid state hard drive
(200) 3690-01092 Scrcap skt hd 10-32 x 3/8l hex skt sst
(4) 3880-01215 Flat washer for pumping plate assy
(48) 3690-01156 Blocker plate screws
(140) 3690-01083 4/40 screw for robot, doors, actuators
(2) 3880-01368 Wshr lkg split m10 7.9mmw x 2.2mmthk stl
(15) 0020-09843 Sleeve wafer lift pin
(19) 3690-01676 Screw mach shldr for ceramic shield on shower
(29) 0020-10722 Modified screw, perf plate, thin
(34) 0020-10721 Cover,screw,teflon thin perf plate
(0) 0020-10728 Clamp, shield 4,5,6"teos
(1) - Gas box oring kit
(5) 3880-01079 Wshr wave sprg .367od x .265id x .030fh
(2) 0015-76034 Mdfd cplg shaft jspdr 1/4 bore
(17) EV-SM24 Ev valves for hot box w/24" leads
(2) 0020-10482 Box,temp/level sensor
(2) 0190-13175 Light pens
Shelf 3:
(1) - Teos watlow controller
(4) 548201 Lid closed switch
(1) 4020-01061 Point of use filter
(6) 3300-01215 Ftg hose conn 1/16h 10-32m brs barb
(2) MCV-2 Check valve
(2) 0020-09882 Amorphous rf connectors
(1) 0010-09301 Cvd throttle valve
(5) 276V75 Oring
(5) 3700-01334 O-ring for gas box
(5) 3700-01329 Throttle valve assy o-ring
(1) 111V75 Oring
(6) 3700-01332 O-ring for gas box
(4) 3700-01739 Oring id 1.859 csd .139 viton 75duro brn
(1) 0020-09881 Adaptor manifold
(8) 109v75 O-ring
(4) 3780-01090 Spring for wafer lift or susceptor
(0) 0015-09056 Lift bellows
(3) 3080-01030 Timing belt for motor
(2) 0015-09055 Bellows assy susceptorhollow
(2) 0200-35525 Resistor, ceramic, near-net shape
(6) 0200-09025 Tube gas feed, quartz 6mmx6.38
Shelf 4:
(4) - Lift actuator
(5) 0090-09006 Slit valve actuator
(2) 0010-09022 Slit valve assy
(1) FC-7700CD 300 Sccm silane
(1) FC-7800 50 Sccm silane
(1) UFM-1100 1 Slm he
(1) FC7700CD 1 Slm o2
(1) FC7700CD 1 Slm c2f6
(0) FC7700CD 500 Sccm he
(1) - Universal chamber integrated pumping stack
(2) 0010-09174 Assy thrvl valve 200mm, downstr,vi oring
(1) 0010-09146 Assy,sil.thrvlv 100-125-150mm,downstr, v
(1) 0100-09094 Box heater control brd
(2) - Misc drive motors
Shelf 5:
(1) 0010-70395 Robot extension motor
(1) 0010-70394 Assy,rotation motor, 5000 robot
(1) - Monitor base assy.
AMAT/APPLIED MATERIALS P5000是一种基于等离子体的高功率蚀刻沉积设备。它是一种先进的开放式腔室工具，设计用于半导体生产过程。该系统具有三模块腔室组件和高速、计算机控制的交付单元。AMAT P-5000可以实现各种蚀刻和沉积化学,同时提供最大的加工吞吐量.通过均匀浮动感应和匹配基板加热，设计制造出具有极高通量和高均匀性的机舱。其占地面积小，使其成为蚀刻过程中易于集成的工具。高压室能够产生10 mTorr，而标准泵站维持在50 mTorr。APPLICED MATERIALS P 5000由AMAT高性能AMAT P 5000工艺控制器驱动。这是一个可自定义的监督工具，能够精确控制沉积参数和配方执行。资产还允许对各种沉积进行准确的程序调整。AMAT P5000的自动锁载模型使其易于与多种基板同时工作，从而提高生产效率。P5000具有整体式锁载设备,无需手动交换材料即可快速转移物料。该系统还包括高速机器人操作硬件，允许从腔室自动装卸物料。APPLIED MATERIALS P-5000支持一系列蚀刻和沉积化学方法,同时提供晶圆内部和晶圆之间的最大蚀刻均匀性。该装置还具有先进的气体溷合和输送功能，可精确调节沉积和蚀刻参数。该机器的反应堆能够产生频率在250 kHz到1000 kHz之间的等离子体。全自动P 5000还包括现场监测和配方调整,以实现快速工艺优化。这样就可以立即对过程中的薄膜进行晶圆级分析,从而使制造商能够即时优化其过程。AMAT/APPLIED MATERIALS P 5000是一款先进的基于等离子体的开放式腔室工具，旨在实现大容量半导体生产。占地面积小，沉积均匀性和吞吐量优越。AMAT/APPLIED MATERIALS P-5000具有自动锁定负载的资产以及高级监控和调整功能,可实现最高级别的生产效率和性能。
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