二手 AMAT / APPLIED MATERIALS P5000 #9236969 待售

PECVD System, 8" Process: Passivation Chamber type: DLH CIM Linked Main frame Load lock SMIF System: ASYST ARM-2200 V111S Handler system: Robot assembly Process chamber: (3) CVD Deposition chambers A, B & C (3) Primary generators (3) RF2 Generators & matches (4) Ebara pumps Heat exchanger Mini SBC board SBC Board SEI Board (2) AI Boards (2) AO Boards VGA Board (4) Stepper driver boards (2) Digital I/O boards Buffer I/O board (2) Optical sensor boards (4) Chopper driver boards (3) Baratrons LAMDA Power supply Hard Disk Drive (HDD) Wiring distribution board Pneumatic board Loader interconnect board (2) TC Gauge boards +12V DC Power supply +15V DC Power supply -15V DC Power supply AI MUX Board (3) RF Generators Controller distribution board Encoder interface board System electronic back plane Robot blade assembly Facility: A10S Loadlock pump A70W Process pump Incoming power: 208 VAC Heat exchanger temperature set point: 65 Buffer: LPT / Indexer: ARM-2200 H112S Center finder Storage elevator: (8) Slots LL Robot type: Metal Load lock actuator: IO Door Chamber actuator: 0010-70162 CDA Pressure for buffer: 60 psi Process chamber: RF 1 Generator: ENI OEM-12B RF 2 Generator: RFPP 7520572050 RF Match: AMAT / APPLIED MATERIALS Automatch 0010-09750 Pressure manometer: MKS 10T (122BA-001000EB-S) Throttle valve / PCV Model: VEXTA PX245-02AA-C4 TC Part number: 3310-01074 Chuck type: P-Chuck Chuck part number: 0010-38437 Process temperature: 400°C MFC Gases: C2F6: 10 SLM SIH4: 3000scc NH3: 300scc N2: 10 SLM N20: 3000 SCC N20 (G): 200 SCCM PH3: 300 SCC DPA Included Endpoint: 0190-09472 CDA Pressure for chamber: 60 psi 1998 vintage.