二手 ASM ALSI ICA1204 #9254251 待售

Laser dicing system JDSU Q-Series UV Laser, 355 nm Module: Coater / Cleaner Tape frame size: DISCO Frame 261 (8.9" OD x 7.6" ID) (2) Cassette stations and priority load port Single wafer load port priority port (2) Independent cassette stations: 12 Slots cassettes, 300 mm 24 Slots cassettes, 200 mm Stroke x-axis: 380 mm Stroke y-axis: 380 mm Stroke z-axis: 3 mm Max speed (X,Y): 500 mm/s Accuracy: Dynamic: 0,5 μm Static: 0,1 μm Laser cabinet size (W, D, H): 1500 x 2000 x 2200 mm 600 x 800 x 800 mm Vacuum: - 0,85 bar, max 20 l/min DI Water: 1 Bar, 2,5-10 l/hr, max 0,5 l/min Water: 5 Bar, max 16-20°C, 20 l/min Process exhaust: 0,85 ± 0,02 Bar filtering required (est 40 m³/hr) Machine exhaust: 100-150 m³/hr Ambient temp: 20°C - 25°C Clean room: < 10.000 Power: Nominal: 8 kVA to 12 kVA Peak: 14 kVA to 18 kVA Input voltage: 400/VAC Connection type: 3 Phase delta + N + PE Frequency: 48 - 60 Hz Compressed air: 5 Bar, max 700 ln/min 2012 vintage.