二手 MATTSON Millios #9223132 待售

Single chamber RTP system, 12" mS Anneal Single chamber platform Process capabiltiy for sd_anneal HK-Anneals Real time temperature measurement system With closed loop control: 400°C to 1350°C Top side temperature control Oxygen sensor (Ntron type) Facility monitoring (6) Dummy stations / (6) Cooling stations Signal tower at front side: (4) Colors One set of documentation on CD-ROM MCS With gem interface Stand alone gui MSEC Anneal pulse : 0.3ms - 2.5ms Single power supply termination: 400V to 480V.