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Millios

Flash Rapid Thermal Processor (FRTP) EFEM MPSU Module Service module Process module SCCT Rack VFD Mo
197
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MATTSON Millios #293665008

MATTSON

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Furnace 2011 vintage.
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MATTSON Millios #9359557

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Millisecond anneal system.
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MATTSON Millios #9223132

MATTSON

Millios

Single chamber RTP system, 12" mS Anneal Single chamber platform Process capabiltiy for sd_anneal H
207