二手 PERKIN ELMER 4400 #9201790 待售

製造商
PERKIN ELMER
模型
4400
ID: 9201790
晶圆大小: 6"
Sputtering system, 6" Wafer loading: Manual With load lock Cathodes: Circle shape, 8″ & 4 max Sputter methods: RF / DC Diode / MAGNETRON Gas lines: 1~3 MFC Options: Gas lines with MFC N2 O2 Customized Lamp tower alarm with buzzer: Mechanical pump / Dry pump for process chamber and load lock Independent mechanical pump / Dry pump for process chamber Chiller for cooling plates and table Turbo pump for load lock Load lock lamp heating function: Up to 200°C Chamber lamp heating function: Up to 300°C Plasma etch function Bias function Co sputter function Reactive sputter function Main frame 28" Diameter SST chamber top plate with ports and cathodes: Configuration 4400 4410 / 4450 Cathode shape Circle Delta Cathode size 8" Delta Cathode quantity 1 to 4 1 to 3 Sputter power supply: 4400 4410 / 4450 DC Power 5 kW 5 kW / 10 kW RF Power 1kW / 2kW 2 kW / 3 kW Pulse DC Power 5 kW 5 kW / 10 kW Process chamber: 8" Diameter x 12" High stainless steel cylinder with 6" CF Flange view port and load lock port 28" Diameter stainless steel base plate 11/2" Air operated roughing isolation valve Air operated gas inlet valve Air operated vent valve 11/2" Blanked-off leak check port Removable deposition shields 23" Diameter, 3-position water cooled annular substrate Table with variable speed motorized table drive Full circle shutter and vane shutter Chain drive pallet carrier transport Heavy duty electric hoist Load lock: 30" x 28" x 8" Stainless steel load lock chamber Aluminum cover Chain drive pallet carrier transport 2" Air operated roughing isolation valve Air operated vent valve 23" Diameter molybdenum annular substrate pallet Elevator for pallet up and down function Vacuum systems for process chamber: (2) Stage cryo pumps With 1000 l/s pumping speed for air Includes: Chevron Water cooled compressor and lines Automatic regeneration controller Plumbing kit, 71/2" Aluminum air operated gate valve: 6" ASA Air operated venetian blind throttling valve Mechanical pump or dry pump for process: 36.7 Cfm Chamber and load lock Replaced obsolete controls: Auto pump down controller Load lock controller Digital clock timer Table raise / Lower control Throttle valve control system Pressure control system Sputter head controls Gas line with MFC Ar, 200 SCCM, customized Power box: AC 380 V / 208 V / 3 Phase.
PERKIN ELMER 4400是一种最先进的溅射设备,已成为薄膜真空沉积的通用通用工具。这个溅射工具是一个多源系统,允许溅射任何金属或介电材料在其三室设计与其定制的端部安装晶片支架。4400可实现精密沉积厚度降至1埃,薄膜均匀性降至1纳米。通过获得专利的铜目标保护方法实现了这种精确测量,该方法还确保了工艺的可重复性以及较长的周期生产时间。采用TRIO-MIM^TM密封磁控管技术,保证薄膜材料沉积过程中腔室不受污染。TRIO-MIM^TM密封磁控管技术加热溅射目标,从而打开了改变工艺参数的额外潜力。这允许高密度、高导电性薄膜以及更复杂的有机材料在沉积过程中需要更高的底物温度的性能。PERKIN ELMER 4400是一种可靠且易于操作的设备。这种溅射设备在晶片支架的尺寸方面提供了灵活性,并且能够通过实时软件控制来调整溅射参数,从而提高工艺精度。使用内置的自动校准功能可以方便地进行机器校准。对于生产环境中的UL认证操作,它也是一个足够强大的工具。除了其一般的沉积应用外,在创建高级设备组件时还经常使用4400。它对基板进行机械抛光,以确保表面光滑,而溅射过程在设备上产生微观的微观特征。PERKIN ELMER 4400是一种可靠、高效的溅射资产,可提供局部和全室溅射溅射,并提供可选的原位沉积和退火。该模型的特点允许生产质量最高的薄膜,同时控制生产成本。
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