二手 DNS / DAINIPPON SSW-60A-AR #293689357 待售

ID: 293689357
晶圆大小: 6"
Spin scrubber, 6" Non-SMIF Type Loading position type: Left side No GEM Controller 3-Colors signal tower (2) Reverse units Indexer unit: Type: (4) Cassette Wafer defect sensor and vaccumless A type Transfer robot TR Unit: Dual arm transfer robot Wafer defect sensor Back-side spin unit: Mechanical chuck Brush nozzle DIW1, DIW2, Back rinse, Brush rinse, N2 Blow and N2 Purge Front-side unit: Vacuum chuck Brush nozzle Jet nozzle DIW1, DIW2, Back rinse, Jet rinse, N2 Blow and N2 Purge Side cabinet: Jet pump Meghcon cabinet R/D Rack Missing parts: Servo AMO 5-Axis drive T/R Board 2000 vintage.
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