二手 EBARA UFP 200A #9100402 待售
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ID: 9100402
晶圆大小: 8"
优质的: 2003
Full automatic Cu plating system, 8"
Main body
Controller
Wafer holders
Wafers: W8-0333834-01 Semi standard 200mm, V notch 725um thick, semi-standard 200mm OF thickness 725um
Plating:
Post Cu
Method Electronics
Time: 90 min
Currency density: 5.4A/dm2
Liquid temp: 25°C
Plating sink: Dip
Anord including P
Thickness: 110~120 um
Re-wiring
Method: Electronics
Time: 14 min
Currency density: 2.0A/dm2
Liquid temp: 25°C
Plating sink: Dip
Anord including P
Thickness: 6.5 um
Transfer by robot
Operating mode: automatic, maintenance, return
Cu plating
Dry in/Dry out
Liquid insert
Liquid inside sink and tubing can be drawn
Semi standard cassette applicable
Semi standard load port applicable
(25) Fluoroware 200mm PA200-79MD
Semi standard cassette applicable robot
Can place wafers on rinse dryer
Can place wafers on notch aligner
Can handle wafers on notch aligner
Notch aligner can detect wafer notch
Rinse dryer can rinse wafers after plating
Can dry after plating
Holder transfer robot can remove wafer holder from wafer placing position
Wafer holder standard position from each sink
Stock sink: 2 x 19
Material: PVC
Voluum: 194 L
Accessories: Jig placing plate, liquid sensor, wafer holder sensor
Post water rinse: 2 x 3
Material: PVC
Volume: 72 L
Accessories: Jig placing plate, liquid sensor
Post process sink: 2 x 1
Material: HTPVC
Sink: Upper over flow
Volume: 37 L
Accessories: jig placing plate, liquid sensor, circulation pump, temp sensor, temp unit
Water rinse: 2 x 1
Material: PVC
Sink: quick damp
Volume: 17 L
Accessories: jig placing unit, liquid sensor
Cu plating: 2 x 26
Material: HTPVC
Sink: upper over flow
Volume: 280 L
Accessories: Jig placing unit, liquid sensor, liquid mixer, plating liquid circulation pump, temp sensor, temp unit
Blow: 2 x 1
Material: PVC
Volume: 17 L
Plating(spare) 2x2
Material HTPVC
sink upper over flow
Volume 72L
Accessories Jig placing plate, liquid sensor, liquid mixer, plating liquid circulation pump, temp sensor, temp unit
Waste sink 1
material PVC
Volume 205 L
Accessories liquid surface detector, waste liquid pump, temp sensor
Tubing
Can circulate plating liquid
can keep temperature at 25°C ±1°
Can exhaust waste liquid
Can add pure water
Currently warehoused
2003 vintage.
EBARA UFP 200A是为微电子基板的紫外线曝光和高精度蚀刻而设计的光刻设备。该系统采用大功率、稳定的灯，为必要的紫外线辐射源提供强大而高效的光源。其可调滤轮允许微调频谱输出，以达到最佳工作性能。该机器配备了高效的风冷冷凝器，以帮助在暴露过程中保持工作温度。此外，该装置还配备了防静电机器，以减少污染风险。UFP 200A光刻工具具有支持高性能处理的一系列功能。它具有用户友好的触摸屏界面和广泛的设置，允许准确和精确地控制曝光过程。资产的数字输出可用于驱动其他设备，如扫描仪，以方便蚀刻过程。此外，它还可以与多种基板一起使用，包括金属、陶瓷和硅。该模型是为广泛的蚀刻应用而设计的。根据温度和压力设置,EBARA UFP 200A每通道可蚀刻到8微米的深度。其基于激光的光电传感器能够精确控制曝光时间、错误检测和自动校正过程。设备被编程为执行预热、曝光和后硬化过程以及蚀刻过程。UFP 200A光致抗蚀剂系统是一种可靠、高效的装置，可精确复制和蚀刻各种基板上的高分辨率结构。其用户友好的界面和广泛的设置提供了最大的功能，同时确保精确的结果。该机的坚固设计确保了多年的可靠性能，使得EBARA UFP 200A光刻和微电子加工的绝佳选择。
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