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HITACHI M 511AE #9400299

HITACHI

M 511AE

Etcher, 8" (3) Cassettes / FOUP Position SECS II Interface Metal etch: Microwave ECR (M), UHF ECR (U
314
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HITACHI M 511AE #9133920

HITACHI

M 511AE

Plasma etching system, 8" System configuration: 3-Poly CH Etching CH gases: N2, SF6, CL2, CF4, Ar, O
195
HITACHI M 511AE #293654403

HITACHI

M 511AE

Poly etcher, 8".
216
HITACHI M 511AE #9270559

HITACHI

M 511AE

Poly etcher, 8".
201
HITACHI M 511AE #9092953

HITACHI

M 511AE

Poly etchers, 8", 1995 vintage.
194