二手 VEECO Gen II #9173265 待售
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ID: 9173265
MBE Growth system
Chamber with (8) source flange size 4.5”
Sources: Al, Ga, In, Be, Si, GaTe, As, Sb
(2) Ion pumps:
Main chamber (600 l/m)
Preparation chamber (400 l/m) with (2) power supplies
CTI8 Cryo pump for main chamber
6” Turbo pump with dry pump for load lock
(2) Ti-Sublimation pumps
With power supplies in base of main chamber
Sample manipulator with servo motors for rotation, 2" or 3"
Position setting
Control unit
Beam flux monitor
Controller
Sample manipulator heater with power supply
Temperature controller and display
(3) Ion gauges:
With (3) power supplies and controllers
Main chamber
Preparation chamber
Load lock
Load lock for 4-10 wafers
With heater for pre-bake out at 150°C, power supply included
Temperature controller
Preparation chamber
With heater for bake out at 400°C, power supply included
Temperature controller
Electrical distribution panel
Bake out panels with electrical connections
(8) Shutters with their control units
Utility distribution box for water, air, N2
QMS and RHEED with power supplies
Operating system and computer (Latest version of Moly, or AMBER, or EPIMAX)
4-6 Sample holders
Silver coated copper gaskets
Pyrometer
RHEED Camera and analysis software
Turn key project
Effusion cell:
Flange, 4.5"
Dual or single heater up to 1350 C
85-155 CC PBN crucible
Power supply
Temperature controller.
VARIAN/VEECO GEN II是一种分子束外延(MBE)设备,可用于生长包括III-V多型、氧化物、氮化物、石墨烯和稀土元素在内的多种材料。该系统由两个主要组成部分组成,包括一个两室MBE单元以及对工具和仪器的全面补充。两室MBE机由蒸发室和生长室组成。蒸发室有六个Knudsen细胞源,允许材料类型的变化。生长室是一个高度可定制的浴管为基础的腔室,旨在最大限度地实现外延生长。该工具配备了大量的子系统,所有这些子系统都旨在优化材料质量,包括温度控制、基板加热和六轴原位监测。控制资产允许自动化的增长过程以及远程控制。此外,该模型还配备了一系列可选参数,包括源几何形状的定制、狭缝刀片和栅格、样品吞吐量和腔室压力控制,以及预对准和后对准功能,以提高材料质量和准确性。最后,设备配备了多种不同的支撑系统,包括脱气集群、远程电子枪、激光系统以及允许用户绘制出电位的控制器组合,以进一步优化材料质量和增长速度。总而言之,VEECO GEN II是一个强大的单元,能够种植各种材料。其众多的辅助系统和参数,以及自动控制,允许对材料生长进行精确操作,以产生一致的高质量材料,然后可用于各种应用。
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