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PLASMATHERM VLR #9156983

PLASMATHERM

VLR

ICP Bosch system, 8" Cassette to Cassette System (1) LM-TM: Single load lock with single end effecto
120
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PLASMATHERM VLR #9156981

PLASMATHERM

VLR

ICP Bosch system, 8" Cassette to Cassette System (1) LM/TM module single load lock with single end e
120
PLASMATHERM VLR #9205771

PLASMATHERM

VLR

ICP Bosch, 6" 1998 vintage.
98
PLASMATHERM VLR #9205768

PLASMATHERM

VLR

Reactive Ion Etcher (RIE), 6"-8" Wafer processing LM / TM System 1996 vintage.
91
PLASMATHERM VLR #9225837

PLASMATHERM

VLR

Reactive Ion Etcher (RIE), 6"-8" MOD 1996 vintage.
103
PLASMATHERM VLR #9225838

PLASMATHERM

VLR

System, 6" LM / TM 1996 vintage.
104
PLASMATHERM VLR #9139644

PLASMATHERM

VLR

ICP Bosch system, 6" 1998 vintage.
110
PLASMATHERM VLR #9139623

PLASMATHERM

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RIE LM/TM systems, 6" 1996 vintage.
88