二手DNS / DAINIPPON SU-3100待售
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晶圆大小
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Wet station (8) Chambers Chemicals: BOE, HF, O3 Does not include PC 2010 vintage.
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Wet station, 12" PR Strip process (DECAP) PC (8) Chambers Chemical: SC-1, SPM Temperature (SPM / SC-
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Wafer cleaning system, 12" Single process Low temperature (8) Chambers (4) Load ports Chemicals: LAL
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Wafer cleaning system 9 Modules UPS: 3 Φ, 4 W, 208 V, 150 A Power supply: 3 Φ, 4 W, 208 V, 51 A 2010
314
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DNS / DAINIPPON
SU-3100
Wafer cleaning system, 12" CU Strip, 12" (2) Blocks (8) Chambers (4) Load ports Robot YASKAWA Index
326